Hydrogen Sensor Based on Pd/GeO{sub 2} Using a Low Cost Electrochemical Deposition

Journal Article · Wed May 25 00:00:00 EDT 2011 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.3587031· OSTI ID:21513235

Jawad, M J; Hashim, M R ^[1]; Ali, N K ^[2]

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1. School of Physics, Universiti Sains Malaysia, 11800-Penang (Malaysia)
2. Material Innovations and Nanoelectronics Research Group, Faculty of Electrical Engineering, Department of electronic engineering, Universiti Teknologi Malaysia, 81310 Skudai, Johor (Malaysia)

This work reports on a synthesis of sub micron germanium dioxide (GeO{sub 2}) on porous silicon (PS) by electrochemical deposition. n-type Si (100) wafer was used to fabricate (PS) using conventional method of electrochemical etching in HF based solution. A GeCl{sub 4} was directly hydrolyzed by hydrogen peroxide to produce pure GeO{sub 2}, and then electrochemically deposited on PS. Followed by palladium (Pd) contact on GeO{sub 2} /PS was achieved by using RF sputtering technique. The grown GeO{sub 2} crystals were characterized using SEM and EDX. I-V characteristics of Pd/ GeO{sub 2} were recorded before and after hydrogen gas exposure as well as with different H{sub 2} concentrations and different applied temperatures. The sensitivity of Pd/ GeO{sub 2} also has been investigated it could be seen to increase significantly with increased hydrogen concentration while it decreased with increase temperature.

• OSTI ID: 21513235
• Journal Information: AIP Conference Proceedings, Vol. 1341, Issue 1; Conference: Escinano2010: 2010 international conference on enabling science and nanotechnology, Kuala Lumpur (Malaysia), 1-3 Dec 2010; Other Information: DOI: 10.1063/1.3587031; (c) 2011 American Institute of Physics; ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
CRYSTALS
ELECTRIC CONDUCTIVITY
ELECTROCHEMISTRY
ELECTRODEPOSITION
ETCHING
GERMANATES
GERMANIUM
GERMANIUM CHLORIDES
GERMANIUM OXIDES
HYDROFLUORIC ACID
HYDROGEN
HYDROGEN PEROXIDE
PALLADIUM
POROUS MATERIALS
SCANNING ELECTRON MICROSCOPY
SENSITIVITY
SENSORS
SILICON
SPUTTERING
SYNTHESIS
CHALCOGENIDES
CHEMISTRY
CHLORIDES
CHLORINE COMPOUNDS
DEPOSITION
ELECTRICAL PROPERTIES
ELECTROLYSIS
ELECTRON MICROSCOPY
ELEMENTS
FLUORINE COMPOUNDS
GERMANIUM COMPOUNDS
HALIDES
HALOGEN COMPOUNDS
HYDROGEN COMPOUNDS
INORGANIC ACIDS
INORGANIC COMPOUNDS
LYSIS
MATERIALS
METALS
MICROSCOPY
NONMETALS
OXIDES
OXYGEN COMPOUNDS
PEROXIDES
PHYSICAL PROPERTIES
PLATINUM METALS
SEMIMETALS
SURFACE COATING
SURFACE FINISHING
TRANSITION ELEMENTS