Suppression of Divergence of Low Energy Ion Beams by Space Charge Neutralization with Low Energy Electrons Emitted from Field Emitter Arrays

Journal Article · Fri Jan 07 00:00:00 EST 2011 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.3548461· OSTI ID:21510130

Ishikawa, Junzo ^[1]; Gotoh, Yasuhito; Taguchi, Shuhei; Nicolaescu, Dan; Tsuji, Hiroshi; Kimoto, Tsunenobu ^[2]; Takeuchi, Mitsuaki ^[3]; Sakai, Shigeki ^[4]

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1. Department of Electronics and Information Engineering, Chubu University, 1200 Matsumoto-cho, Kasugai, 487-8501 (Japan)
2. Department of Electronic Science and Engineering, Kyoto University, Kyotodaigaku-Katsura, Nishikyo-ku, Kyoto 615-8510 (Japan)
3. JST Innovation Plaza Kyoto, Goryo-ohara, Nishiky-ku, Kyoto 615-, Japan and Photonics and Electronics Research Center, Kyoto University, Kyotodaigaku-Katsura, Nishikyo-ku, Kyoto 615-8510 (Japan)
4. Nissin Ion Equpment Co., Ltd., 575 Kuze-Tonoshiro-cho, Minami-ku, Kyoto 601-8205 (Japan)

Suppression of divergence of low energy neon ion beam was experimentally demonstrated by neutralizing the space charge of ion beam with low energy electrons emitted from silicon field emitter arrays (Si-FEAs). Treatment of the FEAs with trifluoromethane plasma realized surface carbonization which was efficient to elongate the lifetime of the FEA and to improve the electron energy distribution. Together with the improvement of the performance of Si-FEA, we have developed a novel electron deceleration system to produce low energy electrons. A low energy neon ion beam was produced and the beam property was investigated with and without the electron supply from surface carbonized Si-FEA (Si:C-FEA). As a result, the divergence of the neon ion beam was largely suppressed with presence of the electrons.

• OSTI ID: 21510130
• Journal Information: AIP Conference Proceedings, Vol. 1321, Issue 1; Conference: IIT 2010: 18. international conference on ion implantation technology, Kyoto (Japan), 6-11 Jun 2010; Other Information: DOI: 10.1063/1.3548461; (c) 2010 American Institute of Physics; ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ACCELERATION
AVAILABILITY
CARBONIZATION
ELECTRONS
ENERGY SPECTRA
ION BEAMS
IRON ARSENIDES
LIFETIME
MICROELECTRONICS
NEON IONS
PERFORMANCE
PLASMA
SILICON
SPACE CHARGE
SURFACES
ARSENIC COMPOUNDS
ARSENIDES
BEAMS
CHARGED PARTICLES
CHEMICAL REACTIONS
DECOMPOSITION
ELEMENTARY PARTICLES
ELEMENTS
FERMIONS
IONS
IRON COMPOUNDS
LEPTONS
PNICTIDES
SEMIMETALS
SPECTRA
TRANSITION ELEMENT COMPOUNDS