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Title: A fine-focusing x-ray source using carbon-nanofiber field emitter

Journal Article · · Journal of Applied Physics
DOI:https://doi.org/10.1063/1.3475213· OSTI ID:21476433
; ; ; ; ; ;  [1];  [2]
  1. Graduate School of Engineering, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466-8555 (Japan)
  2. Topcon Corporation, 75-1 Hasunuma-cho, Itabashi-ku, Tokyo 174-8580 (Japan)

A fine-focusing x-ray source has been constructed employing a field electron emitter prepared by growing carbon-nanofibers (CNFs) on a metal tip. The x-ray source is composed of a CNF field electron emitter, an electrostatic lens, two magnetic lenses, and a W-target for generating x-rays by electron impact. The CNFs provided field electrons with a current density of J{approx}5x10{sup 9} A/m{sup 2}, which was evaluated with the aid of Fowler-Nordheim theory. The electron beam extracted from the CNF emitter was accelerated to the energies of E=10-25 keV, and then focused by the lenses. By recording the x-ray images of test charts, the optimum resolution of the x-ray source was estimated to be approximately D{sub x}=0.5 {mu}m.

OSTI ID:
21476433
Journal Information:
Journal of Applied Physics, Vol. 108, Issue 4; Other Information: DOI: 10.1063/1.3475213; (c) 2010 American Institute of Physics; ISSN 0021-8979
Country of Publication:
United States
Language:
English