Schottky barrier height behavior of Pt-Ru alloy contacts on single-crystal n-ZnO

Journal Article · Sat May 15 00:00:00 EDT 2010 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3427562· OSTI ID:21476255

Nagata, T; Haemori, M; Hayakawa, R; Yoshitake, M; Chikyow, T ^[1]; Volk, J ^[2]; Yamashita, Y ^[1]; Yoshikawa, H; Ueda, S; Kobayashi, K ^[3]

---

1. Advanced Electronic Materials Center, National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305-0044 (Japan)
2. Research Institute for Technical Physics and Materials Science, H-1121 Budapest, Konkoly Thege Miklos ut 29-33 (Hungary)
3. NIMS Beamline Station at SPring-8, National Institute for Materials Science, 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148 (Japan)

We investigated the Schottky barrier height (SBH) behavior of binary alloy Schottky contacts on n-type zinc oxide (n-ZnO) single crystals. Pt-Ru alloy electrodes were deposited on the Zn-polar and O-polar faces of ZnO substrates by combinatorial ion-beam deposition under identical conditions. The crystal structures of the Pt-Ru alloy film changed from the Pt phase (cubic structure) to the Ru phase (hexagonal structure) in the Pt-Ru alloy phase diagram with decreasing Pt content. The SBH, determined from current-voltage measurements, decreased with decreasing Pt content, indicating that the SBH behavior also followed the Pt-Ru alloy phase diagram. The alloy electrodes on the Zn-polar face showed better Schottky properties than those on the O-polar face. Hard x-ray photoelectron spectroscopy revealed a difference in the interface oxidization of the Pt-Ru alloy: the interface of the O-polar face and Pt-Ru mixed phase with poor crystallinity had a more oxidized layer than that of the Zn-polar face. As a result of this oxidization, the O-polar face, Pt-Ru mixed, and Ru phases showed poor Schottky properties.

• OSTI ID: 21476255
• Journal Information: Journal of Applied Physics, Vol. 107, Issue 10; Other Information: DOI: 10.1063/1.3427562; (c) 2010 American Institute of Physics; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
CRYSTAL-PHASE TRANSFORMATIONS
CUBIC LATTICES
DEPOSITION
ELECTRIC CONDUCTIVITY
ELECTRODES
HEXAGONAL LATTICES
INTERFACES
ION BEAMS
LAYERS
MONOCRYSTALS
OXIDATION
PHASE DIAGRAMS
PLATINUM ALLOYS
RUTHENIUM ALLOYS
SEMICONDUCTOR MATERIALS
SUBSTRATES
X-RAY PHOTOELECTRON SPECTROSCOPY
ZINC OXIDES
ALLOYS
BEAMS
CHALCOGENIDES
CHEMICAL REACTIONS
CRYSTAL LATTICES
CRYSTAL STRUCTURE
CRYSTALS
DIAGRAMS
ELECTRICAL PROPERTIES
ELECTRON SPECTROSCOPY
INFORMATION
MATERIALS
OXIDES
OXYGEN COMPOUNDS
PHASE TRANSFORMATIONS
PHOTOELECTRON SPECTROSCOPY
PHYSICAL PROPERTIES
PLATINUM METAL ALLOYS
SPECTROSCOPY
TRANSITION ELEMENT ALLOYS
ZINC COMPOUNDS