Micron-focused ion beamlets

Journal Article · Sat May 15 00:00:00 EDT 2010 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3371688· OSTI ID:21476176

Chowdhury, Abhishek; Bhattacharjee, Sudeep ^[1]

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1. Department of Physics, Indian Institute of Technology, Kanpur 208016 (India)

A multiple beam electrode system (MBES) is used to provide focused ion beamlets of elements from a compact microwave plasma. In this study, a honeycomb patterned plasma electrode with micron size apertures for extracting ion beamlets is investigated. The performance of the MBES is evaluated with the help of two widely adopted and commercially available beam simulation tools, AXCEL-INP and SIMION, where the input parameters are obtained from our experiments. A simple theoretical model based upon electrostatic ray optics is employed to compare the results of the simulations. It is found that the results for the beam focal length agree reasonably well. Different geometries are used to optimize the beam spot size and a beam spot {approx}5-10 {mu}m is obtained. The multiple ion beamlets will be used to produce microfunctional surfaces on soft matter like polymers. Additionally, the experimental set-up and plans are presented in the light of above applications.

• OSTI ID: 21476176
• Journal Information: Journal of Applied Physics, Vol. 107, Issue 9; Other Information: DOI: 10.1063/1.3371688; (c) 2010 American Institute of Physics; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
A CODES
APERTURES
BEAM EXTRACTION
BEAM OPTICS
BEAM-PLASMA SYSTEMS
COMPARATIVE EVALUATIONS
COMPUTERIZED SIMULATION
ELECTRODES
ION BEAMS
MICROWAVE RADIATION
PERFORMANCE
PLASMA
PLASMA SIMULATION
S CODES
BEAMS
COMPUTER CODES
ELECTROMAGNETIC RADIATION
EVALUATION
OPENINGS
RADIATIONS
SIMULATION