Fabrication of size-selected Pd nanoclusters using a magnetron plasma sputtering source
- Department of Physics, United Arab Emirates University, Al Ain, P.O. Box 17551 (United Arab Emirates)
We report on the fabrication of palladium (Pd) nanoclusters using a dc magnetron sputtering source. Plasma sputtering vaporizes the target's material forming nanoclusters by inert gas condensation. The sputtering source produces ionized nanoclusters that enable the study of the nanoclusters' size distribution using a quadrupole mass filter. In this work, the dependence of Pd nanoclusters' size distribution on various source parameters, such as the sputtering discharge power, inert gas flow rate, and aggregation length have been investigated. This work demonstrates the ability of tuning the palladium nanoclusters' size by proper optimization of the source operation conditions. The experimental nanocluster sizes are compared with a theoretical model that reveals the growth of large nanoclusters from 'embryos' by a two-body collision. The model is valid for a specific range of deposition parameters (low inert gas flow rates and aggregation lengths equal or below 70 mm).
- OSTI ID:
- 21476132
- Journal Information:
- Journal of Applied Physics, Vol. 107, Issue 3; Other Information: DOI: 10.1063/1.3296131; (c) 2010 American Institute of Physics; ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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