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Title: Fabrication of a Prototype All-Dielectric Micro-Accelerator

Journal Article · · AIP Conference Proceedings
DOI:https://doi.org/10.1063/1.3520358· OSTI ID:21428809
; ; ;  [1];  [2]
  1. UCLA Department of Physics and Astronomy, Los Angeles, CA 90095 (United States)
  2. Manhattanville College, Department of Physics, Purchase, NY 10577 (United States)

A laser-powered micron-scale, all-dielectric, slab-symmetric accelerator has been under development at UCLA for several years, with an experimental program underway. The device is built from dielectric Bragg reflectors and includes periodic nanoscale coupling structures, which requires micromanufacturing techniques and a cleanroom facility. We report here on results of fabrication experiments and the construction of a prototype device. A method for patterning the periodic coupling structures using electron beam lithography is described, and sputter deposition of thin films (such as ZrO{sub 2}/SiO{sub 2}) to create a distributed Bragg reflector is discussed. Future plan includes reflection and transmission measurements using the drive laser on prototype devices, and the resonance frequency and strength will be evaluated.

OSTI ID:
21428809
Journal Information:
AIP Conference Proceedings, Vol. 1299, Issue 1; Conference: 14. advanced accelerator concepts workshop, Annapolis, MD (United States), 13-19 Jun 2010; Other Information: DOI: 10.1063/1.3520358; (c) 2010 American Institute of Physics; ISSN 0094-243X
Country of Publication:
United States
Language:
English