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Title: A Novel Solid Electrolyte Oxygen Sensor System for In-Situ Measurement and Process Control

Abstract

In 1993 the oxygen partial pressure was firstly measured inside a plasma wind tunnel using conventional {lambda}-probes. Since then, a considerable amount of knowledge has been gained in using these sensors in ground test facilities and space. However, these commercially available sensors were too large in scale and weight. Consequently, a new development of solid electrolyte sensors called FIPEX more feasible for space was initiated. Due to space driven benefits, interest arose to use FIPEX technique in terrestrial applications e.g. to monitor sputter plants for float glass coating. Therefore, the VacuSen registered sensor was developed. The characterization of VacuSen registered at nominal sensor temperature T{sub S} = 680 deg. C resulted in a sensor current according to I{sub S} = b{center_dot}p{sub O2}{sup 0{center_dot}8{+-}0{center_dot}05} I[{mu}A] in the operation range between p{sub tot} = 1{center_dot}10{sup -3} to 5 Pa. From pulse width modulation (PWM) temperature control, additional information allows to measure ptot according to p{sub tot} = a{center_dot}RPWM{sup 0{center_dot}107{+-}0{center_dot}005} thus enlarging the operation range to p{sub tot} = 1{center_dot}10{sup -3} to 1{center_dot}10{sup 5} Pa. A one point calibration routine with air, ideally at p{sub tot} = 5 Pa in order to determine both calibration parameters a and b simultaneously, is proposed.

Authors:
 [1]; ;  [1]
  1. Institut fuer Raumfahrtsysteme, Universitaet Stuttgart, Pfaffenwaldring 31, 70569 Stuttgart (Germany)
Publication Date:
OSTI Identifier:
21428639
Resource Type:
Journal Article
Journal Name:
AIP Conference Proceedings
Additional Journal Information:
Journal Volume: 1282; Journal Issue: 1; Conference: 7. international symposium on applied plasma science, Hamburg (Germany), 31 Aug - 4 Sep 2009; Other Information: DOI: 10.1063/1.3508561; (c) 2010 American Institute of Physics; Journal ID: ISSN 0094-243X
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; AIR; CALIBRATION; ELECTROLYSIS; MODULATION; OXYGEN; PARTIAL PRESSURE; PLASMA; PLASMA WAVES; PROCESS CONTROL; PULSES; SENSORS; SOLID ELECTROLYTES; TEMPERATURE CONTROL; TEST FACILITIES; CONTROL; ELECTROLYTES; ELEMENTS; FLUIDS; GASES; LYSIS; NONMETALS; PHYSICAL PROPERTIES; THERMODYNAMIC PROPERTIES

Citation Formats

Hammer, Frank Uwe, ESCUBE GmbH and Co. KG, Nobelstrasse 15, 70569 Stuttgart, Messerschmid, Ernst, and Rogg, Markus. A Novel Solid Electrolyte Oxygen Sensor System for In-Situ Measurement and Process Control. United States: N. p., 2010. Web. doi:10.1063/1.3508561.
Hammer, Frank Uwe, ESCUBE GmbH and Co. KG, Nobelstrasse 15, 70569 Stuttgart, Messerschmid, Ernst, & Rogg, Markus. A Novel Solid Electrolyte Oxygen Sensor System for In-Situ Measurement and Process Control. United States. https://doi.org/10.1063/1.3508561
Hammer, Frank Uwe, ESCUBE GmbH and Co. KG, Nobelstrasse 15, 70569 Stuttgart, Messerschmid, Ernst, and Rogg, Markus. 2010. "A Novel Solid Electrolyte Oxygen Sensor System for In-Situ Measurement and Process Control". United States. https://doi.org/10.1063/1.3508561.
@article{osti_21428639,
title = {A Novel Solid Electrolyte Oxygen Sensor System for In-Situ Measurement and Process Control},
author = {Hammer, Frank Uwe and ESCUBE GmbH and Co. KG, Nobelstrasse 15, 70569 Stuttgart and Messerschmid, Ernst and Rogg, Markus},
abstractNote = {In 1993 the oxygen partial pressure was firstly measured inside a plasma wind tunnel using conventional {lambda}-probes. Since then, a considerable amount of knowledge has been gained in using these sensors in ground test facilities and space. However, these commercially available sensors were too large in scale and weight. Consequently, a new development of solid electrolyte sensors called FIPEX more feasible for space was initiated. Due to space driven benefits, interest arose to use FIPEX technique in terrestrial applications e.g. to monitor sputter plants for float glass coating. Therefore, the VacuSen registered sensor was developed. The characterization of VacuSen registered at nominal sensor temperature T{sub S} = 680 deg. C resulted in a sensor current according to I{sub S} = b{center_dot}p{sub O2}{sup 0{center_dot}8{+-}0{center_dot}05} I[{mu}A] in the operation range between p{sub tot} = 1{center_dot}10{sup -3} to 5 Pa. From pulse width modulation (PWM) temperature control, additional information allows to measure ptot according to p{sub tot} = a{center_dot}RPWM{sup 0{center_dot}107{+-}0{center_dot}005} thus enlarging the operation range to p{sub tot} = 1{center_dot}10{sup -3} to 1{center_dot}10{sup 5} Pa. A one point calibration routine with air, ideally at p{sub tot} = 5 Pa in order to determine both calibration parameters a and b simultaneously, is proposed.},
doi = {10.1063/1.3508561},
url = {https://www.osti.gov/biblio/21428639}, journal = {AIP Conference Proceedings},
issn = {0094-243X},
number = 1,
volume = 1282,
place = {United States},
year = {Wed Oct 13 00:00:00 EDT 2010},
month = {Wed Oct 13 00:00:00 EDT 2010}
}