The New X-Ray Lithography Beamline BL1 At DELTA

Journal Article · Wed Jun 23 00:00:00 EDT 2010 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.3463213· OSTI ID:21410251

Lietz, D; Paulus, M; Sternemann, C; Berges, U; Hippert, B; Tolan, M ^[1]

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1. Fakultaet Physik / DELTA, TU Dortmund, Maria-Goeppert-Mayer-Str. 2, 44227 Dortmund (Germany)

Lithography using synchrotron radiation in the x-ray regime provides a powerful method to produce mechanical components of sub-millimeter size with a very good quality for microtechnological applications. In recent years the demand for x-ray lithography beamtime for industrial production of microparts increased rapidly resulting in the development of new experimental endstations at synchrotron radiation sources dedicated for the production of micromechanical devices. We present in this work the layout of the new x-ray lithography beamline BL1 at the synchrotron radiation source DELTA in Dortmund and discuss first results of exposure tests.

• OSTI ID: 21410251
• Journal Information: AIP Conference Proceedings, Vol. 1234, Issue 1; Conference: SRI 2009: 10. international conference on radiation instrumentation, Melbourne (Australia), 27 Sep - 2 Oct 2009; Other Information: DOI: 10.1063/1.3463213; (c) 2010 American Institute of Physics; ISSN 0094-243X
• Country of Publication: United States
• Language: English

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