Fabrication of 3-{mu}m diameter pin hole array (PHA) on thick W substrates
- ILIL-CNR and National Laboratory of Frascati (LNF) (Italy)
- Department of Physic, University of Pisa, and INFN Sec. of Pisa (Italy)
- ILIL-National Research Council (CNR), Research Area of Pisa (Italy)
- Department of Physic, University of Pisa, INFN Sec. of Pisa (Italy) and LNF (Italy)
- BIONEM-Campus Magna Graecia University of Catanzaro (Italy)
Pin-hole arrays are used for a variety of applications including, for example, X-ray imaging of laser-plasmas for fusion relevant studies. More recently, a novel X-ray imaging technique has been proposed (this conference L. A. Gizzi et al.) within the High Power Laser Energy Research Facility (HiPER) to obtain spectrally resolved X-ray imaging using single photon detection. This technique requires a large number of images or, alternatively, large arrays of pin-holes, possibly with very small diameter (<<10 {mu}m). In view of this, a technique was implemented for the fabrication of large arrays of pin-holes in thick metal substrates. Here we report on the optimizations of the laser-matter interaction process to obtain high aspect ratio cylinder-like pin-hole on heavy metal substrate by using a frequency-doubled Ti:Sa femtosecond laser pulses operating at 10 Hz. The influence of an air breakdown and a (ns)prepulse, on the drilled pin-hole, is showed by means of SEM images both for surface effects and internal quality of the channels, with evidence of micro and nano-sized structures. The holes drilled at an intensity just below the laser breakdown threshold for plasma creation in air, have an internal diameter of about 3 {mu}m on a W substrate of 70 {mu}m thickness, a micro-cylinder-like shape and no detectable deviations of the axis from a straight line. Arrays of up to 800 pin-holes were produced with the pin-hole properties being highly stable across the array. The final X-ray transmission is showed by using a mu-focus X-ray source.
- OSTI ID:
- 21370963
- Journal Information:
- AIP Conference Proceedings, Vol. 1209, Issue 1; Conference: 2. international conference on ultra-intense laser interaction science, Frascati (Italy), 24-29 May 2009; Other Information: DOI: 10.1063/1.3326320; (c) 2010 American Institute of Physics; ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
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