Coherent hard x-ray diffractive imaging of nonisolated objects confined by an aperture
- Department of Materials Science and Engineering and Nanobio Materials and Electronics, Graduate Program of Photonics and Applied Physics, Gwangju Institute of Science and Technology, Gwangju 500-712 (Korea, Republic of)
Coherent hard x-ray imaging of nonisolated weak phase objects is demonstrated by confining x-ray beam in a region of a few micrometers in cross section using a micrometer-sized aperture. Two major obstacles in the hard x-ray coherent diffraction imaging, isolating samples and obtaining central speckles, are addressed by using the aperture. The usefulness of the proposed method is illustrated by reconstructing the exit wave field of a nanoscale trench structure fabricated on silicon which serves as a weak phase object. The quantitative phase information of the exit wave field was used to reconstruct the depth profile of the trench structure. The scanning capability of this method was also briefly discussed.
- OSTI ID:
- 21366737
- Journal Information:
- Physical Review. B, Condensed Matter and Materials Physics, Vol. 81, Issue 16; Other Information: DOI: 10.1103/PhysRevB.81.165437; (c) 2010 The American Physical Society; ISSN 1098-0121
- Country of Publication:
- United States
- Language:
- English
Similar Records
High-resolution projection image reconstruction of thick objects by hard x-ray diffraction microscopy
Hard x-ray holographic microscopy using refractive prism and Fresnel zone plate objective