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Title: Atom probe microscopy of three-dimensional distribution of silicon isotopes in {sup 28}Si/{sup 30}Si isotope superlattices with sub-nanometer spatial resolution

Abstract

Laser-assisted atom probe microscopy of 2 nm period {sup 28}Si/{sup 30}Si isotope superlattices (SLs) is reported. Three-dimensional distributions of {sup 28}Si and {sup 30}Si stable isotopes are obtained with sub-nanometer spatial resolution. The depth resolution of the present atom probe analysis is much higher than that of secondary ion mass spectrometry (SIMS) even when SIMS is performed with a great care to reduce the artifact due to atomic mixing. Outlook of Si isotope SLs as ideal depth scales for SIMS and three-dimensional position standards for atom probe microscopy is discussed.

Authors:
; ; ;  [1];  [2]; ; ;  [3]
  1. School of Fundamental Science and Technology, Keio University, 3-14-1 Hiyoshi, Kohoku-ku, Yokohama 223-8522 (Japan)
  2. Corporate Research and Development Center, Toshiba Corporation, 8 Shinsugita-cho, Isogo-ku, Yokohama 235-8522 (Japan)
  3. Toshiba Nanoanalysis Corporation, 1 Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8583 (Japan)
Publication Date:
OSTI Identifier:
21361878
Resource Type:
Journal Article
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 106; Journal Issue: 7; Other Information: DOI: 10.1063/1.3236673; (c) 2009 American Institute of Physics; Journal ID: ISSN 0021-8979
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ION MICROPROBE ANALYSIS; IONS; LASERS; MASS SPECTRA; MASS SPECTROSCOPY; MICROSCOPY; SEMICONDUCTOR MATERIALS; SILICON; SILICON 28; SILICON 30; SPATIAL RESOLUTION; SUPERLATTICES; THREE-DIMENSIONAL CALCULATIONS; CHARGED PARTICLES; CHEMICAL ANALYSIS; ELEMENTS; EVEN-EVEN NUCLEI; ISOTOPES; LIGHT NUCLEI; MATERIALS; MICROANALYSIS; NONDESTRUCTIVE ANALYSIS; NUCLEI; RESOLUTION; SEMIMETALS; SILICON ISOTOPES; SPECTRA; SPECTROSCOPY; STABLE ISOTOPES

Citation Formats

Shimizu, Yasuo, Kawamura, Yoko, Uematsu, Masashi, Itoh, Kohei M, Tomita, Mitsuhiro, Sasaki, Mikio, Uchida, Hiroshi, and Takahashi, Mamoru. Atom probe microscopy of three-dimensional distribution of silicon isotopes in {sup 28}Si/{sup 30}Si isotope superlattices with sub-nanometer spatial resolution. United States: N. p., 2009. Web. doi:10.1063/1.3236673.
Shimizu, Yasuo, Kawamura, Yoko, Uematsu, Masashi, Itoh, Kohei M, Tomita, Mitsuhiro, Sasaki, Mikio, Uchida, Hiroshi, & Takahashi, Mamoru. Atom probe microscopy of three-dimensional distribution of silicon isotopes in {sup 28}Si/{sup 30}Si isotope superlattices with sub-nanometer spatial resolution. United States. https://doi.org/10.1063/1.3236673
Shimizu, Yasuo, Kawamura, Yoko, Uematsu, Masashi, Itoh, Kohei M, Tomita, Mitsuhiro, Sasaki, Mikio, Uchida, Hiroshi, and Takahashi, Mamoru. 2009. "Atom probe microscopy of three-dimensional distribution of silicon isotopes in {sup 28}Si/{sup 30}Si isotope superlattices with sub-nanometer spatial resolution". United States. https://doi.org/10.1063/1.3236673.
@article{osti_21361878,
title = {Atom probe microscopy of three-dimensional distribution of silicon isotopes in {sup 28}Si/{sup 30}Si isotope superlattices with sub-nanometer spatial resolution},
author = {Shimizu, Yasuo and Kawamura, Yoko and Uematsu, Masashi and Itoh, Kohei M and Tomita, Mitsuhiro and Sasaki, Mikio and Uchida, Hiroshi and Takahashi, Mamoru},
abstractNote = {Laser-assisted atom probe microscopy of 2 nm period {sup 28}Si/{sup 30}Si isotope superlattices (SLs) is reported. Three-dimensional distributions of {sup 28}Si and {sup 30}Si stable isotopes are obtained with sub-nanometer spatial resolution. The depth resolution of the present atom probe analysis is much higher than that of secondary ion mass spectrometry (SIMS) even when SIMS is performed with a great care to reduce the artifact due to atomic mixing. Outlook of Si isotope SLs as ideal depth scales for SIMS and three-dimensional position standards for atom probe microscopy is discussed.},
doi = {10.1063/1.3236673},
url = {https://www.osti.gov/biblio/21361878}, journal = {Journal of Applied Physics},
issn = {0021-8979},
number = 7,
volume = 106,
place = {United States},
year = {Thu Oct 01 00:00:00 EDT 2009},
month = {Thu Oct 01 00:00:00 EDT 2009}
}