Electron induced dissociation of trimethyl (methylcyclopentadienyl) platinum (IV): Total cross section as a function of incident electron energy

Journal Article · Thu Oct 01 00:00:00 EDT 2009 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3225091· OSTI ID:21361875

Dorp, W F. van ^[1]; Wnuk, J D; Gorham, J M; Fairbrother, D H ^[2]; Madey, T E ^[3]; Hagen, C W ^[4]

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1. Department of Physics and Astronomy, Laboratory of Surface Modification, Rutgers, State University of New Jersey, Piscataway, New Jersey 08854-8019 (United States)
2. Department of Chemistry, Johns Hopkins University, Baltimore, Maryland 21218 (United States)
3. Department of Physics and Astronomy, Laboratory of Surface Modification, Rutgers, The State University of New Jersey, Piscataway, New Jersey 08854-8019 (United States)
4. Charged Particle Optics Group, Faculty of Applied Sciences, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft (Netherlands)

The total cross section has been measured for the electron induced dissociation of trimethyl (methylcyclopentadienyl) platinum (IV) [MeCpPt(IV)Me{sub 3}], a Pt precursor often used in focused electron beam induced processing (FEBIP), for incident electron energies ranging between 3-3 keV. Measurements were performed for the precursor in the adsorbed state under ultrahigh vacuum conditions. The techniques used in this study were temperature programmed desorption, x-ray photoelectron spectroscopy and mass spectrometry. Two surfaces were used in these experiments, amorphous carbon overlayers containing embedded Pt atoms (a:C-Pt), formed by the electron decomposition of the Pt precursor, and atomically clean Au. The results from these three experiments revealed a comparatively low total cross section at 8 eV (4.2+-0.3x10{sup -17} cm{sup 2} on the a:C-Pt and 1.4+-0.1x10{sup -17} cm{sup 2} on the Au) that increases with increasing incident electron energy, reaching a maximum at around 150 eV (4.1+-0.5x10{sup -16} cm{sup 2} on the a:C-Pt and 2.3+-0.2x10{sup -16} cm{sup 2} on the clean Au), before decreasing at higher incident electron energies, up to 3000 eV. Differences in the measured cross sections between Au and a:C-Pt surfaces demonstrate that the substrate can influence the reaction cross section of adsorbed species. Temperature programmed desorption was also used to measure the adsorption energy of MeCpPt(IV)Me{sub 3}, which was found to depend on both the substrate and the adsorbate coverage. The work in this paper demonstrates that surface science techniques can be used to quantitatively determine the total cross section of adsorbed FEBIP precursors for electron induced dissociation as a function of incident electron energy. These total cross section values are necessary to obtain quantitatively accurate information from FEBIP models and to compare the reaction efficiencies of different precursors on a quantitative basis.

• OSTI ID: 21361875
• Journal Information: Journal of Applied Physics, Vol. 106, Issue 7; Other Information: DOI: 10.1063/1.3225091; (c) 2009 American Institute of Physics; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ADSORPTION
AMORPHOUS STATE
CARBON
CHEMICAL ANALYSIS
DECOMPOSITION
DESORPTION
DISSOCIATION
ELECTRON BEAMS
ELECTRONS
EV RANGE
LAYERS
MASS SPECTROSCOPY
ORGANIC COMPOUNDS
PLATINUM
PLATINUM COMPOUNDS
PRECURSOR
SUBSTRATES
SURFACES
TOTAL CROSS SECTIONS
X-RAY PHOTOELECTRON SPECTROSCOPY
BEAMS
CHEMICAL REACTIONS
CROSS SECTIONS
ELECTRON SPECTROSCOPY
ELEMENTARY PARTICLES
ELEMENTS
ENERGY RANGE
FERMIONS
LEPTON BEAMS
LEPTONS
METALS
NONMETALS
PARTICLE BEAMS
PHOTOELECTRON SPECTROSCOPY
PLATINUM METALS
SORPTION
SPECTROSCOPY
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS