Microstructure and tribological properties of Ti-contained amorphous carbon film deposited by DC magnetron sputtering

Journal Article · Tue Dec 15 00:00:00 EST 2009 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3272018· OSTI ID:21359395

Li, R L; Tu, J P; Hong, C F; Liu, D G ^[1]; Zhou, D H; Sun, H L ^[2]

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1. Department of Materials Science and Engineering and State Key Laboratory of Silicon Materials, Zhejiang University, Hangzhou 310027 (China)
2. Zhejiang Huijin-Teer Coatings Technology Co., Ltd., Hangzhou 311300 (China)

Pure amorphous carbon (a-C) film and that with a small amount of Ti were deposited on high speed steel (W18Cr4V) substrates by means of dc closed field unbalanced magnetron sputtering. The chemical composition and microstructure of the a-C films were performed using x-ray photoelectron spectroscopy, x-ray diffraction, Raman spectra, and transmission electron microscopy. The mechanical and tribological properties were evaluated using a nanoindentor, Rockwell and scratch tests, and a conventional ball-on-disk tribometer, respectively. The pure a-C film showed the high hardness (53 GPa), elastic modulus (289 GPa), but the poor adhesive strength. When adding a small amount of Ti to the a-C film, both the adhesive strength and the tribological properties were improved. The Ti contained a-C film had the low wear rate (1.9x10{sup -17} m{sup 3} N{sup -1} m{sup -1}) and friction coefficient in humid air.

• OSTI ID: 21359395
• Journal Information: Journal of Applied Physics, Vol. 106, Issue 12; Other Information: DOI: 10.1063/1.3272018; (c) 2009 American Institute of Physics; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ADHESIVES
AMORPHOUS STATE
CARBON
CHEMICAL COMPOSITION
DEPOSITION
FRICTION
FRICTION FACTOR
HARDNESS
MICROSTRUCTURE
PRESSURE RANGE GIGA PA
RAMAN SPECTRA
SPUTTERING
STEELS
SUBSTRATES
THIN FILMS
TITANIUM COMPOUNDS
TRANSMISSION ELECTRON MICROSCOPY
X-RAY DIFFRACTION
X-RAY PHOTOELECTRON SPECTROSCOPY
ALLOYS
CARBON ADDITIONS
COHERENT SCATTERING
DIFFRACTION
DIMENSIONLESS NUMBERS
ELECTRON MICROSCOPY
ELECTRON SPECTROSCOPY
ELEMENTS
FILMS
IRON ALLOYS
IRON BASE ALLOYS
MECHANICAL PROPERTIES
MICROSCOPY
NONMETALS
PHOTOELECTRON SPECTROSCOPY
PRESSURE RANGE
SCATTERING
SPECTRA
SPECTROSCOPY
TRANSITION ELEMENT ALLOYS
TRANSITION ELEMENT COMPOUNDS