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Title: Temperature distributions of radio-frequency plasma in water by spectroscopic analysis

Journal Article · · Journal of Applied Physics
DOI:https://doi.org/10.1063/1.3264671· OSTI ID:21359368
; ; ; ;  [1];  [2]
  1. Graduate School of Science and Engineering, Ehime University, 3 Bunkyo-cho, Matsuyama 790-8577 (Japan)
  2. Faculty of Agriculture, Ehime University, Matsuyama 790-8566 (Japan)

Distributions of emission intensity from radicals, electron temperature, and rotational temperature at a radio frequency of 27.12 MHz plasma in water are clarified by detailed spectroscopy measurement. Through this investigation, the following were observed. The points of maximum emission intensity of Halpha, Hbeta, O (777 nm), and O (845 nm) are almost the same, while that of OH shifts upward. The electron temperature decreases, while the rotational temperature increases with pressure. The distribution of the electron temperature changes at a threshold pressure, which is concerned with a change in the electron discharge mechanism. The self-bias of the electrode changes from a negative to positive at a threshold pressure. The point of the maximum rotational temperature of OH radicals shifts to approximately 1 mm above that for the maximum intensity of OH emission.

OSTI ID:
21359368
Journal Information:
Journal of Applied Physics, Vol. 106, Issue 11; Other Information: DOI: 10.1063/1.3264671; (c) 2009 American Institute of Physics; ISSN 0021-8979
Country of Publication:
United States
Language:
English