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Title: Effect of radio frequency discharge power on dusty plasma parameters

Journal Article · · Journal of Applied Physics
DOI:https://doi.org/10.1063/1.3186022· OSTI ID:21359344
 [1]
  1. Department of Physics and Astronomy, Ohio Northern University, Ada, Ohio 45810 (United States)

The parameters of a two-dimensional dusty plasma consisting of six, 9 mum diameter particles trapped inside a radio frequency (rf) plasma sheath have been measured as a function of rf power in a 13.5 mtorr (1.8 Pa) argon discharge. The center-of-mass and breathing frequencies are found by projecting the cluster's Brownian motion onto the associated normal mode. The center-of-mass frequency (i.e., radial confinement) is insensitive to rf power. The Debye shielding parameter kappa, as found from the breathing frequency, increases from approx =0.5 to 2 as the square root of rf power. The Debye length decreases from approx =2.7 to 0.7 mm as the inverse of the square root of rf power. The average particle charge qapprox =-17 000e is effectively independent of rf power. These results are consistent with an electron temperature that is independent of rf power and an ion density that is directly proportional to rf power, where the Debye length is determined by the ion density in combination with the electron temperature.

OSTI ID:
21359344
Journal Information:
Journal of Applied Physics, Vol. 106, Issue 3; Other Information: DOI: 10.1063/1.3186022; (c) 2009 American Institute of Physics; ISSN 0021-8979
Country of Publication:
United States
Language:
English