Structure and corrosion behavior of platinum/ruthenium/nitrogen doped diamondlike carbon thin films

Journal Article · Wed Jul 01 00:00:00 EDT 2009 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3154022· OSTI ID:21359279

Khun, N W; Liu, E; Yang, G C; Ma, W G; Jiang, S P ^[1]

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1. School of Mechanical and Aerospace Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798 (Singapore)

Platinum/ruthenium/nitrogen doped diamondlike carbon (PtRuN-DLC) thin films were deposited on p-Si (100) substrates with dc magnetron cosputtering by varying the dc power applied to a Pt{sub 50}Ru{sub 50} target to investigate the effect of Pt and Ru incorporation in the films on the bonding structure, adhesion strength, surface morphology, and corrosion behavior of the films by means of X-ray photoelectron spectroscopy, micro-Raman spectroscopy, microscratch test, atomic force microscopy, scanning electron microscopy, and potentiodynamic polarization test. It was found that the incorporation of Pt and Ru in the N-DLC films improved the corrosion resistance of the films in a 0.1M NaCl solution at lower polarization potentials though more sp{sup 2} bonds were formed in the films. However, the films with higher Pt and Ru contents degraded earlier than the ones with lower Pt and Ru contents at higher polarization potentials.

• OSTI ID: 21359279
• Journal Information: Journal of Applied Physics, Vol. 106, Issue 1; Other Information: DOI: 10.1063/1.3154022; (c) 2009 American Institute of Physics; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ADHESION
ATOMIC FORCE MICROSCOPY
CHEMICAL BONDS
CORROSION
CORROSION RESISTANCE
DEPOSITION
DIAMONDS
DOPED MATERIALS
ELECTROLYTES
MORPHOLOGY
NITROGEN
PLATINUM
POLARIZATION
RAMAN SPECTRA
RAMAN SPECTROSCOPY
RUTHENIUM
SCANNING ELECTRON MICROSCOPY
SILICON
SODIUM CHLORIDES
SPUTTERING
SUBSTRATES
THIN FILMS
X-RAY PHOTOELECTRON SPECTROSCOPY
ALKALI METAL COMPOUNDS
CARBON
CHEMICAL REACTIONS
CHLORIDES
CHLORINE COMPOUNDS
ELECTRON MICROSCOPY
ELECTRON SPECTROSCOPY
ELEMENTS
FILMS
HALIDES
HALOGEN COMPOUNDS
LASER SPECTROSCOPY
MATERIALS
METALS
MICROSCOPY
MINERALS
NONMETALS
PHOTOELECTRON SPECTROSCOPY
PLATINUM METALS
REFRACTORY METALS
SEMIMETALS
SODIUM COMPOUNDS
SPECTRA
SPECTROSCOPY
TRANSITION ELEMENTS