The functionalization of graphene using electron-beam generated plasmas

Journal Article · Mon Jun 07 00:00:00 EDT 2010 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.3436556· OSTI ID:21347403

Baraket, M; Walton, S G; Lock, E H ^[1]; Robinson, J T; Perkins, F K ^[2]

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1. Plasma Physics Division, Naval Research Laboratory, Washington, DC 20375 (United States)
2. Electronics Division, Naval Research Laboratory, Washington, DC 20375 (United States)

A plasmas-based, reversible functionalization of graphene is discussed. Using electron-beam produced plasmas, oxygen and fluorine functionalities have been added by changing the processing gas mixtures from Ar/O{sub 2} to Ar/SF{sub 6}, respectively. The reversibility of the functionalization was investigated by annealing the samples. The chemical composition and structural changes were studied by x-ray photoelectron spectroscopy and Raman spectroscopy.

• OSTI ID: 21347403
• Journal Information: Applied Physics Letters, Vol. 96, Issue 23; Other Information: DOI: 10.1063/1.3436556; (c) 2010 American Institute of Physics; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
37 INORGANIC
ORGANIC
PHYSICAL AND ANALYTICAL CHEMISTRY
ANNEALING
ARGON
CHEMICAL ANALYSIS
CHEMICAL COMPOSITION
ELECTRON BEAMS
FLUORINE
MIXTURES
OXYGEN
PLASMA
RAMAN SPECTRA
RAMAN SPECTROSCOPY
SULFUR FLUORIDES
X-RAY PHOTOELECTRON SPECTROSCOPY
BEAMS
DISPERSIONS
ELECTRON SPECTROSCOPY
ELEMENTS
FLUIDS
FLUORIDES
FLUORINE COMPOUNDS
GASES
HALIDES
HALOGEN COMPOUNDS
HALOGENS
HEAT TREATMENTS
LASER SPECTROSCOPY
LEPTON BEAMS
NONMETALS
PARTICLE BEAMS
PHOTOELECTRON SPECTROSCOPY
RARE GASES
SPECTRA
SPECTROSCOPY
SULFUR COMPOUNDS