Ultrasensitive mode-localized mass sensor with electrically tunable parametric sensitivity
- Department of Engineering, University of Cambridge, Trumpington Street, Cambridge CB2 1PZ (United Kingdom)
- Nanoscience Centre, University of Cambridge, 11 JJ Thomson Avenue, Cambridge CB3 0FF (United Kingdom)
We use the phenomena of mode localization and vibration confinement in pairs of weakly coupled, nearly identical microelectromechanical (MEMS) resonators as an ultrasensitive technique of detecting added mass on the resonator. The variations in the eigenstates for induced mass additions are studied and compared with corresponding resonant frequency shifts in pairs of MEMS resonators that are coupled electrostatically. We demonstrate that the relative shifts in the eigenstates can be over three orders of magnitude greater than those in resonant frequency for the same addition of mass. We also investigate the effects of voltage controlled electrical spring tuning on the parametric sensitivity of such sensors and demonstrate sensitivities tunable by over 400%.
- OSTI ID:
- 21347299
- Journal Information:
- Applied Physics Letters, Vol. 96, Issue 8; Other Information: DOI: 10.1063/1.3315877; (c) 2010 American Institute of Physics; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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