Laser-Aided Diagnostics of Atoms and Particulates in Magnetron Sputtering Plasmas

Journal Article · Tue Jul 07 00:00:00 EDT 2009 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.3192233· OSTI ID:21344250

Nafarizal, N ^[1]; Takada, N ^[2]; Sasaki, K ^[3]

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1. Microelectronics and Nanotechnology-Shamsuddin Research Centre (MiNT-SRC), Faculty of Electrical and Electronic Engineering, University Tun Hussein Onn Malaysia, 86400 Batu Pahat, Johor (Malaysia)
2. Department of Electrical Engineering and Computer Science, Nagoya University, 464-8603 Chikusa-ku Nagoya (Japan)
3. Plasma Nanotechnology Research Center, Nagoya University, 464-8603 Chikusa-ku Nagoya (Japan)

Laser-aided diagnostic technique is introduced as an advanced and valuable technique to evaluate the properties of plasma. This technique is an expensive and sophisticated technique which requires researchers to have a basic knowledge in optical spectroscopy. In the present paper, we will generally introduce the experimental work using laser-induced fluorescence (LIF) and laser light scattering (LLS) techniques. The LIF was used to evaluate the spatial distribution of Cu atoms in magnetron sputtering plasma. The change in the spatial distribution was studied as a function of discharge power. On the other hand, the LLS was used to evaluate the generation of Cu particulates in high-pressure magnetron sputtering plasma. The temporal evolution of Cu particulates in the gas phase of sputtering plasma was visualized successfully.

• OSTI ID: 21344250
• Journal Information: AIP Conference Proceedings, Vol. 1150, Issue 1; Conference: 3. international meeting on frontiers in physics, Kuala Lumpur (Malaysia), 12-16 Jan 2009; Other Information: DOI: 10.1063/1.3192233; (c) 2009 American Institute of Physics; ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ATOMS
COPPER
ELECTRIC DISCHARGES
FLUORESCENCE
LASER RADIATION
LASERS
MAGNETRONS
PARTICULATES
PLASMA
PLASMA DIAGNOSTICS
PLASMA PRESSURE
SPATIAL DISTRIBUTION
SPUTTERING
DISTRIBUTION
ELECTROMAGNETIC RADIATION
ELECTRON TUBES
ELECTRONIC EQUIPMENT
ELEMENTS
EMISSION
EQUIPMENT
LUMINESCENCE
METALS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
PARTICLES
PHOTON EMISSION
RADIATIONS
TRANSITION ELEMENTS