Microfabrication of High Resolution X-ray Magnetic Calorimeters

Journal Article · Wed Dec 16 00:00:00 EST 2009 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.3292411· OSTI ID:21325821

Hsieh, W -T; Stevenson, Thomas R ^[1]; Bandler, Simon R ^[1]; Kelly, Daniel P ^[1]; Porst, Jan P ^[2]; Rotzinger, Hannes ^[3]; Seidel, George M ^[4]

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1. NASA Goddard Space Flight Center, Greenbelt, MD 20771 (United States)
2. Kirchhoff Institute for Physics, University of Heidelberg, 69120 Heidelberg (Germany)
3. Physikalisches Institut, Universitaet Karlsruhe, D-76131 Karlsruhe (Germany)
4. Physics Department, Brown University, Providence, RI 02912 (United States)

Metallic magnetic calorimeter (MMC) is one of the most promising x-ray detector technologies for providing the very high energy resolution needed for future astronomical x-ray imaging spectroscopy. For this purpose, we have developed micro-fabricated 5x5 arrays of MMC of which each individual pixel has excellent energy resolution as good as 3.4 eV at 6 keV x-ray. Here we report on the fabrication techniques developed to achieve good resolution and high efficiency. These include: processing of a thin insulation layer for strong magnetic coupling between the AuEr sensor film and the niobium pick-up coil; production of overhanging absorbers for enhanced efficiency of x-ray absorption; fabrication on SiN membranes to minimize the effects on energy resolution from athermal phonon loss. We have also improved the deposition of the magnetic sensor film such that the film magnetization is nearly completely that is expected from the AuEr sputter target bulk material. In addition, we have included a study of a positional sensitive design, the Hydra design, which allows thermal coupling of four absorbers to a common MMC sensor and circuit.

• OSTI ID: 21325821
• Journal Information: AIP Conference Proceedings, Vol. 1185, Issue 1; Conference: LTD13: 13. international workshop on low temperature detectors, Stanford, CA (United States), 20-24 Jul 2009; Other Information: DOI: 10.1063/1.3292411; (c) 2009 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
CALORIMETERS
CRYOGENICS
DESIGN
EFFICIENCY
ENERGY RESOLUTION
ERBIUM
EV RANGE
FABRICATION
GOLD
KEV RANGE
LAYERS
MAGNETIZATION
MEMBRANES
NIOBIUM
RADIATION DETECTORS
SENSORS
SILICON NITRIDES
SQUID DEVICES
SUPERCONDUCTING DEVICES
X-RAY DETECTION