Kinetics of gas-phase chemical reactions in a remote RF plasma reactor with electron spin resonance
- Masaryk Univ., Brno (Czech Republic)
A remote RF plasma reactor is inherently a reactive gas flow system in which the gas-phase chemical reactions of interest occur outside (downstream) the plasma and involve paramagnetic ground state or excited species (e.g. H, O, O{sub 2}, N, NO). Consequently, the kinetics of the gas-phase reactions can be quantitatively characterized by electron spin resonance (ESR). Gas flows and tube pressure are essential parameters for quantitative analysis. The ESR measurements provides the absolute value of paramagnetic species, the determination of recombination and rate coefficients of selected reactions. The goal of the measurements described in the present paper was to find the wall recombination coefficient in pure nitrogen and oxygen and to explain the effect of impurities on both dissociation and recombination of N and O. Next the reaction of atomic oxygen with the molecules of tetraethoxysilane (TEOS) was studied and the kinetic coefficient of this reaction was determined.
- OSTI ID:
- 212782
- Report Number(s):
- CONF-950749-; CNN: Contract 202/93/2118; TRN: 96:009950
- Resource Relation:
- Conference: 22. international conference on phenomena in ionized gases, Hoboken, NJ (United States), 31 Jul - 4 Aug 1995; Other Information: PBD: 1995; Related Information: Is Part Of XXII International conference on phenomena in ionized gases. Contributed papers 2; Becker, K.H.; Carr, W.E.; Kunhardt, E.E. [eds.]; PB: 226 p.
- Country of Publication:
- United States
- Language:
- English
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