Improved plasma uniformity in a discharge system with electron injection
Abstract
We present the results of experiments leading to improvement in bulk plasma uniformity of a constricted-arc discharge system with electron injection. The steady-state discharge was in argon, at a gas pressure of 0.5 mTorr, and operated with a main discharge voltage between 20 and 100 V and current between 3 and 15 A. The radial plasma distribution was measured with a movable Langmuir probe. We find that geometric modification of the intermediate electrode exit aperture and the main discharge cathode add little to the plasma uniformity. Improved bulk plasma uniformity is observed when a special distributing grid electrode is used and the main discharge voltage is less than 20-30 V. The application of a weakly divergent magnetic field in the region of the intermediate electrode exit aperture decreases the plasma nonuniformity from 20% to 14% over a radial distance of 30 cm. The plasma uniformity was further improved by compensating the magnetic self-field of the injected electron beam by a reverse magnetic field produced with a special electrode compensator. It is shown that an increase in discharge current causes a proportional increase in back current in the distributing electrode. The approach allows a decrease in plasma nonuniformity from 20% tomore »
- Authors:
-
- Institute of High Current Electronics, Siberian Division, Russian Academy Science, Tomsk 634055 (Russian Federation)
- Publication Date:
- OSTI Identifier:
- 21266751
- Resource Type:
- Journal Article
- Journal Name:
- Review of Scientific Instruments
- Additional Journal Information:
- Journal Volume: 80; Journal Issue: 2; Other Information: DOI: 10.1063/1.3069291; (c) 2009 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0034-6748
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; APERTURES; ARGON; CATHODES; DISTANCE; DISTRIBUTION; ELECTRIC ARCS; ELECTRIC POTENTIAL; ELECTRON BEAM INJECTION; ELECTRON BEAMS; GRIDS; LANGMUIR PROBE; MAGNETIC FIELDS; PLASMA; STEADY-STATE CONDITIONS
Citation Formats
Vizir, A V, Tyunkov, A V, and Shandrikov, M V. Improved plasma uniformity in a discharge system with electron injection. United States: N. p., 2009.
Web. doi:10.1063/1.3069291.
Vizir, A V, Tyunkov, A V, & Shandrikov, M V. Improved plasma uniformity in a discharge system with electron injection. United States. https://doi.org/10.1063/1.3069291
Vizir, A V, Tyunkov, A V, and Shandrikov, M V. 2009.
"Improved plasma uniformity in a discharge system with electron injection". United States. https://doi.org/10.1063/1.3069291.
@article{osti_21266751,
title = {Improved plasma uniformity in a discharge system with electron injection},
author = {Vizir, A V and Tyunkov, A V and Shandrikov, M V},
abstractNote = {We present the results of experiments leading to improvement in bulk plasma uniformity of a constricted-arc discharge system with electron injection. The steady-state discharge was in argon, at a gas pressure of 0.5 mTorr, and operated with a main discharge voltage between 20 and 100 V and current between 3 and 15 A. The radial plasma distribution was measured with a movable Langmuir probe. We find that geometric modification of the intermediate electrode exit aperture and the main discharge cathode add little to the plasma uniformity. Improved bulk plasma uniformity is observed when a special distributing grid electrode is used and the main discharge voltage is less than 20-30 V. The application of a weakly divergent magnetic field in the region of the intermediate electrode exit aperture decreases the plasma nonuniformity from 20% to 14% over a radial distance of 30 cm. The plasma uniformity was further improved by compensating the magnetic self-field of the injected electron beam by a reverse magnetic field produced with a special electrode compensator. It is shown that an increase in discharge current causes a proportional increase in back current in the distributing electrode. The approach allows a decrease in plasma nonuniformity from 20% to 13% over a radial distance of 30 cm.},
doi = {10.1063/1.3069291},
url = {https://www.osti.gov/biblio/21266751},
journal = {Review of Scientific Instruments},
issn = {0034-6748},
number = 2,
volume = 80,
place = {United States},
year = {Sun Feb 15 00:00:00 EST 2009},
month = {Sun Feb 15 00:00:00 EST 2009}
}