Broad Ion Beam Extraction from Large Bore ECR Ion Source with Cylindrically Comb-Shaped Magnetic Fields Configuration by Feeding Simultaneously 11 to 13 GHz and 2.45 GHz Microwaves
- Osaka Univ., 2-1 Yamada-oka, Suita, Osaka 565-0871 (Japan)
- NIRS, 4-9-1 Anagawa, Inage-ku, Chiba 263-8555 (Japan)
- Tateyama Machine Co. Ltd., 30 Shimonoban, Toyama, Toyama 930-1305 (Japan)
We tried to enlarge the operation window of an electron cyclotron resonance (ECR) ion source for producing the ECR plasma confined by cylindrically comb-shaped magnetic field, and for extracting the broad ion beam under the low pressures and low microwave powers. The magnetic field by permanent magnets constructs ECR zones at different positions for 2.45 GHz and 11 to 13 GHz microwaves, respectively. According to probe measurements, profiles of plasma density and temperature are different for using each single microwave. We conduct production of ECR plasma by launching simultaneously these two frequency microwaves, and obtain flat profiles of the electron density and the electron temperature. These profiles are not achieved by feeding single frequency microwave. It is found that plasma can be controllable on spatial profiles beyond wide operation window of plasma parameters. We conducted preliminary extracting and forming large bore ion beam from this source. We will make this source a part of tandem type ion source for the first stage. We investigated feasibility and hope to realize the device which has wide range operation window in a single device to produce many kinds of ion beams as like to universal source based on ECR ion source.
- OSTI ID:
- 21251682
- Journal Information:
- AIP Conference Proceedings, Vol. 1066, Issue 1; Conference: 17. international conference on ion implantation technology, Monterey, CA (United States), 8-13 Jun 2008; Other Information: DOI: 10.1063/1.3033631; (c) 2008 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
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