On The structure Of Deposited Diamond-Like Carbon Films Produced By Rf (13.56MHz)CH{sub 4} Plasma
- Centre de Developpement des Technologies Avancees, Division des Milieux Ionises and Lasers, Cite 20 Aout 1956, Baba Hassen, Alger (Algeria)
- Laboratoire des couches minces et semiconducteurs, Institut de Physique, USTHB, BP32, El Alia, 16111, Babezzouar, Alger (Algeria)
- Centre de Recherche Nucleaire d'Alger, Laboratoire des Techniques Nucleaire, 02 Bd Frantz Fanon, BP399, Alger-gare 16000 (Algeria)
- King Fahd University of Petrolum and Minerals, P.O. Box 477, Dhahran 31261 (Saudi Arabia)
Plasma enhanced chemical vapour deposition technique is used to grow diamond-like carbon films using pure methane gas plasma. It is known that the structure of the deposited films is largely influenced by the self-bias voltage values and thereafter all the film properties are a function of the structure; this concerns hydrogen concentration and sp{sup 3}/sp{sup 2} hybridisation ratio in DLC films. Then monitoring DLC film properties requires the control of hydrogen concentration and hybridisation rates. This investigation is focused on the study of the structure changes upon the deposition conditions. The correlation between the structure and the deposition conditions was investigated by using various characterization techniques. Fourier Transform Infra-Red Spectroscopy (FTIR) was used to analyse the absorption of optically active hydrogen in the DLC films. The deconvolution of 2900 cm{sup -1} absorption band allows the analysis of all different hybridisations and configurations forming the structure. The total quantity of hydrogen in the film is evaluated by Elastic Recoil Detection Analysis (ERDA). The quantification of sp{sup 2} and sp{sup 3} concentrations is done from X-ray Photoelectron Spectroscopy (XPS). XPS measurements show that DLC films with high quantity of sp{sup 3} hybridisation can be obtained. The discussion and interpretation of these results leads to a better understanding of the relationship between structure and deposition conditions, which, in return, helps us in synthesizing films of desired properties.
- OSTI ID:
- 21251383
- Journal Information:
- AIP Conference Proceedings, Vol. 1047, Issue 1; Conference: LAPAMS'08: 1. international conference on laser plasma applications in materials science, Algiers (Algeria), 23-26 Jun 2008; Other Information: DOI: 10.1063/1.2999914; (c) 2008 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
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