Plasma Parameter Dependence of Critical Particle Size at the Moment of Void Formation in RF Silane Plasmas
- Department of physics, Korea Advanced Institute of Science and Technology, 335 Gwahangno, Yuseong-gu, Daejeon, 305-701 (Korea, Republic of)
- Korea Research Institute of Standards and Science, P.O. Box 102, Yuseong-gu, Daejeon, 305-600 (Korea, Republic of)
- Department of Electric and Computer Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791 (Korea, Republic of)
Although dust-free voids are frequently observed in many dusty plasmas, experiments regarding the critical particle size for the void formation have not been reported much. In this work, the dust particle size measurement at the critical moment of the void formation was performed by the polarization-sensitive laser light scattering method (PSLLS) as the input rf power was varied in the silane plasmas in which particles were created and grown. The electron temperature and ion density were also measured by a floating probe, and the relation between the parameters was studied. The results show that the critical particle size was decreased from 50 nm to 35 nm as the rf power was increased from 30 W to 100 W. In addition, the electron temperature and ion density were increased from 4.7 eV to 6.2 eV and from 7.0x10{sup 9} cm{sup -3} to 1.4x10{sup 10} cm{sup -3}, respectively. To investigate the mechanism of the void formation, we calculated the critical particle size for the void with measured plasma parameters using a simple one-dimensional force balance equation along the horizontal direction (parallel to the electrode). Consequently, the calculated particle sizes were in good agreement with the measured ones.
- OSTI ID:
- 21251222
- Journal Information:
- AIP Conference Proceedings, Vol. 1041, Issue 1; Conference: 5. international conference on the physics of dusty plasmas, Ponta Degada, Azores (Portugal), 18-23 May 2008; Other Information: DOI: 10.1063/1.2996823; (c) 2008 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
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