PARMELA simulations of RF linear accelerators for ion implantation

Journal Article · Thu Jun 10 00:00:00 EDT 1999 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.59052· OSTI ID:21208062

Swenson, D R; Zhimin, Wan; Di Vergilio, W F; Saadatmand, K ^[1]

---

1. Eaton Semiconductor Equipment Operations, 108 Cherry Hill Road, Beverly, Massachusetts 01915 (United States)

RF linear accelerators (LINACs) offer the highest beam energies and currents available to the high-energy segment of the ion-implantation industry. We are using the computer code PARMELA to simulate a variety of beam parameters. The simulations are used to generate beam tunes, optimize LINAC performance, and to design new LINACs.

• OSTI ID: 21208062
• Journal Information: AIP Conference Proceedings, Vol. 475, Issue 1; Conference: 15. international conference on the application of accelerators in research and industry, Denton, TX (United States), 4-7 Nov 1998; Other Information: DOI: 10.1063/1.59052; (c) 1999 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
BEAM CURRENTS
BEAM PRODUCTION
COMPUTERIZED SIMULATION
DESIGN
ION BEAMS
ION IMPLANTATION
LINEAR ACCELERATORS
P CODES
PERFORMANCE
RF SYSTEMS