Surface smoothing of CVD-diamond membrane for X-ray lithography by Gas Cluster Ion Beam

Journal Article · Thu Jun 10 00:00:00 EDT 1999 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.59168· OSTI ID:21207975

Nishiyama, A; Adachi, M ^[1]; Toyoda, N; Hagiwara, N; Matsuo, J; Yamada, I ^[2]

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1. Central Research Institute, Mitsubishi Materials Corp., Omiya, Japan 330-8508 (Japan)
2. Ion Beam Engineering Experimental Lab., Kyoto Univ., Kyoto, Japan 606-8501 (Japan)

Results of the surface smoothing of a CVD-diamond membrane by gas cluster ion beams are presented. An as-deposited diamond membrane with a surface roughness of 400 Aa Ra was irradiated by Ar cluster ions with a energy of 20 keV. A very smooth surface of 30 Aa Ra was obtained at a dose of 3x10{sup 17} ions/cm{sup 2}. This result can be clarified by computer simulation which shows that the surface smoothing of the diamond membrane was improved by a lateral sputtering of the cluster ions. However, a thin graphite layer was formed on the surface by contamination of monomer ions in the cluster beam, which decreased the transparency of the diamond membrane. A subsequent irradiation with O{sub 2} cluster ions removed these graphite layers.

• OSTI ID: 21207975
• Journal Information: AIP Conference Proceedings, Vol. 475, Issue 1; Conference: 15. international conference on the application of accelerators in research and industry, Denton, TX (United States), 4-7 Nov 1998; Other Information: DOI: 10.1063/1.59168; (c) 1999 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ATOMIC CLUSTERS
CHEMICAL VAPOR DEPOSITION
CLUSTER BEAMS
COMPUTERIZED SIMULATION
DIAMONDS
GRAPHITE
ION BEAMS
ION PAIRS
KEV RANGE
LAYERS
MEMBRANES
MOLECULAR CLUSTERS
OPACITY
ROUGHNESS
SPUTTERING
SURFACE TREATMENTS
SURFACES
X RADIATION