Positive ion polymerization in hydrogen diluted silane plasmas

Journal Article · Mon Dec 08 00:00:00 EST 2008 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.3042263· OSTI ID:21175800

Nunomura, S; Kondo, M ^[1]

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1. Research Center for Photovoltaics, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8568 (Japan)

Mass spectra of positive ions (cations) and neutrals have been measured in hydrogen diluted silane plasmas at gas pressures of 0.1-10 Torr. The mass spectrum of ions changes with the pressure, while that of neutrals maintains a similar shape. The dominant ion species varies from a hydrogen ion group at < or approx. 0.5 Torr to a monosilicon hydride ion group at {approx_equal}0.5-1 Torr and polysilicon hydride ion groups at > or approx. 1 Torr, which is determined from ionization channels and consecutive ion-molecule reactions. The ion bombardment is suppressed with the pressure, from several tens of eV at < or approx. 1 Torr to a few eV at > or approx. 7 Torr.

• OSTI ID: 21175800
• Journal Information: Applied Physics Letters, Vol. 93, Issue 23; Other Information: DOI: 10.1063/1.3042263; (c) 2008 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
CATIONS
CHEMICAL ANALYSIS
CHEMICAL VAPOR DEPOSITION
HYDROGEN
HYDROGEN IONS
ION BEAMS
ION-MOLECULE COLLISIONS
IONIZATION
MASS SPECTRA
PLASMA
POLYMERIZATION
SILANES