Effect of microwave frequency on breakdown and electron energy distribution function using a global model
- Department of Nuclear Engineering, University of California, Berkeley, California 94720-1730 (United States)
Global models (GMs) have proven a key modeling tool for the plasma processing field due to simplicity and speed. However, a GM requires specification of the electron energy distribution function (EEDF). The assumption of a Maxwellian EEDF leads to inaccurate reaction rate coefficients and results in error in plasma parameter prediction in high power microwave (HPM) driven discharges. Recently, a GM was developed with a pressure-independent enhanced EEDF to improve fidelity for modeling HPM breakdown. In this work, the GM is extended to 2 decades in frequency, and the frequency effect on HPM breakdown and the EEDF is investigated.
- OSTI ID:
- 21175655
- Journal Information:
- Applied Physics Letters, Vol. 93, Issue 15; Other Information: DOI: 10.1063/1.3003879; (c) 2008 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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