Observation of Ti{sup 4+} ions in a high power impulse magnetron sputtering plasma
Abstract
Multiply charged titanium ions including Ti{sup 4+} were observed in high power impulse magnetron sputtering discharges. Mass/charge spectrometry was used to identify metal ion species. Quadruply charged titanium ions were identified by isotope-induced broadening at mass/charge 12. Due to their high potential energy, Ti{sup 4+} ions give a high yield of secondary electrons, which in turn are likely to be responsible for the generation of multiply charged states.
- Authors:
-
- Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720 (United States)
- Materials and Engineering Research Institute, Sheffield Hallam University, Howard St., Sheffield S1 1WB (United Kingdom)
- Publication Date:
- OSTI Identifier:
- 21124084
- Resource Type:
- Journal Article
- Journal Name:
- Applied Physics Letters
- Additional Journal Information:
- Journal Volume: 93; Journal Issue: 7; Other Information: DOI: 10.1063/1.2973179; (c) 2008 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; CATIONS; ELECTRON EMISSION; ELECTRONS; LINE BROADENING; MAGNETRONS; MASS; MASS SPECTROSCOPY; PLASMA; PLASMA DIAGNOSTICS; POTENTIAL ENERGY; PULSES; SPUTTERING; TITANIUM; TITANIUM IONS; WALL EFFECTS
Citation Formats
Andersson, Joakim, Anders, Andre, and Ehiasarian, Arutiun P. Observation of Ti{sup 4+} ions in a high power impulse magnetron sputtering plasma. United States: N. p., 2008.
Web. doi:10.1063/1.2973179.
Andersson, Joakim, Anders, Andre, & Ehiasarian, Arutiun P. Observation of Ti{sup 4+} ions in a high power impulse magnetron sputtering plasma. United States. https://doi.org/10.1063/1.2973179
Andersson, Joakim, Anders, Andre, and Ehiasarian, Arutiun P. 2008.
"Observation of Ti{sup 4+} ions in a high power impulse magnetron sputtering plasma". United States. https://doi.org/10.1063/1.2973179.
@article{osti_21124084,
title = {Observation of Ti{sup 4+} ions in a high power impulse magnetron sputtering plasma},
author = {Andersson, Joakim and Anders, Andre and Ehiasarian, Arutiun P},
abstractNote = {Multiply charged titanium ions including Ti{sup 4+} were observed in high power impulse magnetron sputtering discharges. Mass/charge spectrometry was used to identify metal ion species. Quadruply charged titanium ions were identified by isotope-induced broadening at mass/charge 12. Due to their high potential energy, Ti{sup 4+} ions give a high yield of secondary electrons, which in turn are likely to be responsible for the generation of multiply charged states.},
doi = {10.1063/1.2973179},
url = {https://www.osti.gov/biblio/21124084},
journal = {Applied Physics Letters},
issn = {0003-6951},
number = 7,
volume = 93,
place = {United States},
year = {Mon Aug 18 00:00:00 EDT 2008},
month = {Mon Aug 18 00:00:00 EDT 2008}
}
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