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Title: Resonance-mode effect on microcantilever mass-sensing performance in air

Abstract

This research investigates the air drag damping effect of the micromachined cantilevers in different resonance modes on the quality factor, which are operated in ambient air. Based on a simplified dish-string model for air drag force acting on the resonant cantilever, the air drag damping properties of the cantilevers vibrating in different modes are analyzed with theoretic vibration mechanics, which is complemented and further confirmed with finite-element simulation. Four kinds of integrated cantilevers, which resonate in the first flexural mode, the second flexural mode, the first torsional mode, and the second torsional mode, respectively, are designed and fabricated by using micromachining techniques. Finally, biomolecular sensing experiments are carried out to verify the theoretical results obtained before. From both the modeling and experimental results, it can be seen that damping characteristics of the torsional cantilever resonators are generally better than that of the flexural ones, and quality factor of the cantilever resonator in a higher-frequency mode is always superior to that in a lower-frequency one. Among the four kinds of microcantilever resonators operated in our experiments, the one operated in the second flexural modes exhibits the highest Q factor and the best biomass sensing performance.

Authors:
;  [1]
  1. State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050 (China)
Publication Date:
OSTI Identifier:
21124044
Resource Type:
Journal Article
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 79; Journal Issue: 7; Other Information: DOI: 10.1063/1.2949390; (c) 2008 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0034-6748
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; AIR; BIOPHYSICS; DAMPING; FINITE ELEMENT METHOD; MACHINING; MECHANICS; PERFORMANCE; QUALITY FACTOR; RESONANCE; RESONATORS; SIMULATION

Citation Formats

Xiaoyuan, Xia, and Xinxin, Li. Resonance-mode effect on microcantilever mass-sensing performance in air. United States: N. p., 2008. Web. doi:10.1063/1.2949390.
Xiaoyuan, Xia, & Xinxin, Li. Resonance-mode effect on microcantilever mass-sensing performance in air. United States. https://doi.org/10.1063/1.2949390
Xiaoyuan, Xia, and Xinxin, Li. 2008. "Resonance-mode effect on microcantilever mass-sensing performance in air". United States. https://doi.org/10.1063/1.2949390.
@article{osti_21124044,
title = {Resonance-mode effect on microcantilever mass-sensing performance in air},
author = {Xiaoyuan, Xia and Xinxin, Li},
abstractNote = {This research investigates the air drag damping effect of the micromachined cantilevers in different resonance modes on the quality factor, which are operated in ambient air. Based on a simplified dish-string model for air drag force acting on the resonant cantilever, the air drag damping properties of the cantilevers vibrating in different modes are analyzed with theoretic vibration mechanics, which is complemented and further confirmed with finite-element simulation. Four kinds of integrated cantilevers, which resonate in the first flexural mode, the second flexural mode, the first torsional mode, and the second torsional mode, respectively, are designed and fabricated by using micromachining techniques. Finally, biomolecular sensing experiments are carried out to verify the theoretical results obtained before. From both the modeling and experimental results, it can be seen that damping characteristics of the torsional cantilever resonators are generally better than that of the flexural ones, and quality factor of the cantilever resonator in a higher-frequency mode is always superior to that in a lower-frequency one. Among the four kinds of microcantilever resonators operated in our experiments, the one operated in the second flexural modes exhibits the highest Q factor and the best biomass sensing performance.},
doi = {10.1063/1.2949390},
url = {https://www.osti.gov/biblio/21124044}, journal = {Review of Scientific Instruments},
issn = {0034-6748},
number = 7,
volume = 79,
place = {United States},
year = {Tue Jul 15 00:00:00 EDT 2008},
month = {Tue Jul 15 00:00:00 EDT 2008}
}