Linear ion source with closed drift and extended acceleration region
- Materials Science and Technology Research Division, Korea Institute of Science and Technology, Cheongryang, P.O. Box 131, Seoul 130-650 (Korea, Republic of)
Ion source with closed drift, which is caused by ExB field, and extended acceleration region is discussed. Though conventional circular-type closed drift ion source has advantages of high efficiency of gas ionization and low ion beam energy, there is a limitation in enlarging the beam size. Linear ion source with horse-track shape with 270 mm ceramic channel width is newly designed and tested. Inert gas (Ar) and reactive gas (O{sub 2}) are discharged. Discharge is ignited with voltage of 90 V. Discharge current is proportional to discharge voltage and increases up to 16.3 A in argon and 15.6 A in oxygen at discharge voltage of 320 V. Extracted ion beam current is also proportional to discharge voltage and is saturated after 280 V for both gases. It is measured up to 0.78 mA/cm{sup 2} in argon beam and 0.73 mA/cm{sup 2} in oxygen beam at a distance of 100 mm from the ion source. Argon ion beam shows better space uniformity than oxygen across the beam extraction region.
- OSTI ID:
- 21103972
- Journal Information:
- Review of Scientific Instruments, Vol. 79, Issue 2; Conference: ICIS 2007: 12. international conference on ion sources, Jeju (Korea, Republic of), 26-31 Aug 2007; Other Information: DOI: 10.1063/1.2821507; (c) 2008 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
- Country of Publication:
- United States
- Language:
- English
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