Actively stabilized optical fiber interferometry technique for online/in-process surface measurement
- Centre for Precision Technologies, University of Huddersfield, Huddersfield HD1 3DH (United Kingdom)
In this paper, we report the recent progress in optical-beam scanning fiber interferometry for potential online nanoscale surface measurement based on the previous research. It attempts to generate a robust and miniature measurement device for future development into a multiprobe array measurement system. In this research, both fiber-optic-interferometry and the wavelength-division-multiplexing techniques have been used, so that the optical probe and the optical interferometer are well spaced and fast surface scanning can be carried out, allowing flexibility for online measurement. In addition, this system provides a self-reference signal to stabilize the optical detection with high common-mode noise suppression by adopting an active phase tracking and stabilization technique. Low-frequency noise was significantly reduced compared with unstabilized result. The measurement of a sample surface shows an attained repeatability of 3.3 nm.
- OSTI ID:
- 21103863
- Journal Information:
- Review of Scientific Instruments, Vol. 79, Issue 2; Other Information: DOI: 10.1063/1.2870085; (c) 2008 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
- Country of Publication:
- United States
- Language:
- English
Similar Records
Towards the development of a hybrid-integrated chip interferometer for online surface profile measurements
Research plan for the development of optical fiber pressure sensors for nuclear applications