Deposited debris characteristics and its reduction of a laser-produced plasma extreme ultraviolet source using a colloidal tin dioxide jet target

Journal Article · Mon May 05 00:00:00 EDT 2008 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.2924302· OSTI ID:21102014

Kaku, Masanori; Suetake, Sumihiro; Senba, Yusuke; Kubodera, Shoichi ^[1]; Katto, Masahito ^[2]; Higashiguchi, Takeshi ^[3]

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1. Department of Electrical and Electronic Engineering and Photon Science Center, University of Miyazaki, Gakuen Kibanadai Nishi 1-1, Miyazaki 889-2192 (Japan)
2. Cooperative Research Center, University of Miyazaki, Gakuen Kibanadai Nishi 1-1, Miyazaki 889-2192 (Japan)
3. Department of Energy and Environmental Science, Utsunomiya University, Yoto 7-1-2, Utsunomiya, Tochigi 321-8585 (Japan)

Debris characteristics and their reduction have been investigated for a laser-produced plasma extreme ultraviolet source by using a colloidal jet target containing tin dioxide nanoparticles. The amounts of deposited debris on a witness plate were determined by total laser energy irradiated onto a target. In situ low-temperature (100 deg. C) heating of a plate was effective to reduce the amounts of deposited debris, since colloidal debris was easily vaporized by the heat.

• OSTI ID: 21102014
• Journal Information: Applied Physics Letters, Vol. 92, Issue 18; Other Information: DOI: 10.1063/1.2924302; (c) 2008 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
EXTREME ULTRAVIOLET RADIATION
LASER-PRODUCED PLASMA
LASERS
NANOSTRUCTURES
PARTICLES
PLASMA HEATING
PLASMA PRODUCTION
PLATES
TEMPERATURE RANGE 0273-0400 K
TIN OXIDES