Chemical gases sensing properties of diamond nanocone arrays formed by plasma etching
- Department of Optics and Electronics Science, Harbin Institute of Technology at Wei Hai, Weihai 264209 (China)
A uniform diamond nanocone array was formed by plasma etching of diamond film in a hot filament chemical vapor deposition (HFCVD) system. A surface amorphous carbon coating layer, which is formed during CH{sub 4}/H{sub 2} plasma-etching process, was removed by Ar plasma in a reactive ion etching system. The hydrogenation of diamond nanocones was performed in H{sub 2} ambience by using the same HFCVD system. The air-diluted NH{sub 3} and NO{sub 2} gases sensing properties of the diamond cone arrays had been studied by using electric current versus measurement time characteristics at room temperature. The repeatable chemical sensing properties of the hydrogenated diamond cone array sensor are enhanced, in comparison with as-formed diamond film. Surface two-dimensional hole gas structure and greatly increased surface-to-volume ratio both play a key role for the excellent detection performance. As-formed diamond nanocone arrays show a promising prospect for applications as chemical sensor for both reducing (NH{sub 3}) and oxidizing (NO{sub 2}) gases.
- OSTI ID:
- 21064448
- Journal Information:
- Journal of Applied Physics, Vol. 102, Issue 10; Other Information: DOI: 10.1063/1.2817465; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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