Temperature Dependence On The Emission Characteristics Of A AuGe Liquid Metal Alloy Ion Source

Journal Article · Mon Apr 23 00:00:00 EDT 2007 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.2733217· OSTI ID:21057176

Ganetsos, Theodore; Laskaris, Nikos; Kotsos, Bill ^[1]; Bischoff, Lothar; Pilz, Wolfgang; Akhmadaliev, Chavkat ^[2]

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1. TEI of Lamia, Department of Electronics, 3rd Km O.N.R. Lamia-Athens, 35100, Lamia (Greece)
2. Research Center Rossendorf Inc., Institute of Ion Beam Physics and Materials Research, P.O. Box 510119, D-01314, Dresden (Germany)

Focused ion beam systems employing liquid metal ion sources have become of increasing importance in the microelectronics industry. Maskless ion implantation as a modern patterning technique is one of the most attractive application of Focused Ion Beams. In spite of the fact that a great deal of research has been carried out on liquid metal ion sources, surprisingly few results exist on the temperature dependence of their emission characteristics. In this article we study a AuGe liquid metal alloy ion source. The unusual results are explained in terms of the abnormal behavior of the surface tension of the alloy with temperature.

• OSTI ID: 21057176
• Journal Information: AIP Conference Proceedings, Vol. 899, Issue 1; Conference: 6. international conference of the Balkan Physical Union, Istanbul (Turkey), 22-26 Aug 2006; Other Information: DOI: 10.1063/1.2733217; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
GERMANIUM ALLOYS
GOLD ALLOYS
ION BEAMS
ION EMISSION
ION IMPLANTATION
ION SOURCES
LIQUID METALS
MICROELECTRONICS
SURFACE TENSION
TEMPERATURE DEPENDENCE