On-Line Mirror Surfacing Monitored by X-ray Shearing Interferometry and X-ray Scattering

Journal Article · Fri Jan 19 00:00:00 EST 2007 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.2436176· OSTI ID:21052632

Ziegler, E; Peverini, L ^[1]; Kozhevnikov, I V ^[2]; Weitkamp, T ^[3]; David, C ^[4]

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1. European Synchrotron Radiation Facility, BP 220, 38043, Grenoble cedex (France)
2. Institute of Crystallography, Leninsky prospect 59, Moscow 119333 (Russian Federation)
3. ANKA Light Source, Forschungs Zentrum Karlsruhe, Postfach 3640, 76021 Karlsruhe (Germany)
4. Laboratory for Micro- and Nano-technology, Paul Scherrer Institut, 5232 Villigen PSI (Switzerland)

We propose a novel fabrication scheme combining a mirror surfacing tool and an on-line metrology instrument, the latter capable of controlling both figure and finish of an X-ray mirror with an accuracy matching the challenging specifications of nanofocusing reflective optics for synchrotron and FEL X-ray beams. This approach will be complementary to the present technologies. The paper reviews some recent achievements and presents pertinent examples of on-line diagnostics performed at the ESRF BM05 beamline for which X-rays prove to be a unique probe.

• OSTI ID: 21052632
• Journal Information: AIP Conference Proceedings, Vol. 879, Issue 1; Conference: 9. international conference on synchrotron radiation instrumentation, Daegu (Korea, Republic of), 28 May - 2 Jun 2006; Other Information: DOI: 10.1063/1.2436176; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
ACCURACY
BEAM OPTICS
EUROPEAN SYNCHROTRON RADIATION FACILITY
FABRICATION
FREE ELECTRON LASERS
INTERFEROMETRY
MIRRORS
OPERATION
PHOTON BEAMS
SPECIFICATIONS
SYNCHROTRON RADIATION
X RADIATION
X-RAY DIFFRACTION