Synthesis and mechanical properties of CrMoC{sub x}N{sub 1-x} coatings deposited by a hybrid coating system

Journal Article · Tue Jan 15 00:00:00 EST 2008 · Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films

DOI:https://doi.org/10.1116/1.2821736· OSTI ID:21020896

Yun, Ji Hwan; Heo, Su Jeong; Kim, Kwang Ryul; Kim, Kwang Ho ^[1]

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1. Division of Materials Science and Engineering, Pusan National University, Busan 609-735 (Korea, Republic of)

Quaternary CrMoC{sub x}N{sub 1-x} coatings were deposited on steel substrates (AISI D2) and Si wafers by a hybrid coating system combining an arc-ion plating technique and a dc reactive magnetron sputtering technique using Cr and Mo targets in an Ar/N{sub 2}/CH{sub 4} gaseous mixture. The carbon content of CrMoC{sub x}N{sub 1-x} coatings was linearly increased with increasing CH{sub 4}/(CH{sub 4}+N{sub 2}) gas flow rate ratio. The maximum hardness of 44 GPa was obtained from the CrMoC{sub x}N{sub 1-x} coatings containing a carbon content of x=0.33 with a residual stress of -4.4 GPa. The average friction coefficient of Cr-Mo-N coatings was 0.42, and it is decreased to 0.31 after applying CrMoC{sub x}N{sub 1-x} coatings. This result was caused by the formation of a carbon-rich transfer layer that acted as a solid lubricant to reduce contact between the coating surface and steel ball. The microstructure of the coatings was investigated by x-ray diffraction, scanning electron microscopy, and x-ray photoelectron spectroscopy. In this work, the microstructure and mechanical properties of the CrMoC{sub x}N{sub 1-x} coatings were systematically investigated with the instrumental analyses.

• OSTI ID: 21020896
• Journal Information: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films, Vol. 26, Issue 1; Other Information: DOI: 10.1116/1.2821736; (c) 2008 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); ISSN 1553-1813
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
CARBON
CHROMIUM COMPOUNDS
COATINGS
FRICTION FACTOR
GAS FLOW
HARDNESS
HYBRIDIZATION
MAGNETRONS
METHANE
MICROSTRUCTURE
MOLYBDENUM COMPOUNDS
PLATING
PRESSURE RANGE GIGA PA
RESIDUAL STRESSES
SCANNING ELECTRON MICROSCOPY
SOLID LUBRICANTS
SPUTTERING
STEELS
X-RAY DIFFRACTION
X-RAY PHOTOELECTRON SPECTROSCOPY