Subsurface modifications in indium phosphide induced by single and multiple femtosecond laser pulses: A study on the formation of periodic ripples
- Brockhouse Institute for Materials Research, McMaster University, Hamilton L8S 4M1 (Canada)
We use cross-sectional transmission electron microscopy to study the damage induced below the surface of indium phosphide (InP) samples by single and multiple femtosecond laser pulses with a photon energy lower than the InP band gap. Single-pulse irradiation creates a {approx}100 nm deep crater with a resolidified surface layer consisting of quasiamorphous indium phosphide. The resolidified layer has a thickness of {approx}60 nm at the center and extends laterally beyond the edge of the crater rim. Exposure to multiple femtosecond pulses of 2050 nm center wavelength results in the formation of laser-induced periodic surface structures (LIPSS) with two different periods, one ({approx}1730 nm) less than but close to the laser wavelength and one ({approx}470 nm) four times smaller. Segregation beneath both types of ripples leads to the formation of In-rich particles embedded in the resolidified surface layer. Extended defects are detected only below the center of the multiple-pulse crater and their distribution appears to be correlated with the LIPSS modulation. Finally, LIPSS formation is discussed in terms of the observed subsurface microstructures.
- OSTI ID:
- 20982671
- Journal Information:
- Journal of Applied Physics, Vol. 101, Issue 3; Other Information: DOI: 10.1063/1.2423136; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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