Real-time optical monitoring of thin film growth by in situ pyrometry through multiple layers and effective media approximation modeling

Journal Article · Mon Mar 26 00:00:00 EDT 2007 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.2717558· OSTI ID:20960187

Benedic, F; Bruno, P; Pigeat, Ph ^[1]

---

1. Laboratoire d'Ingenierie des Materiaux et des Hautes Pressions, UPR 1311 CNRS, Universite Paris 13, 99 avenue J. B. Clement, 93430 Villetaneuse (France)

A model combining multiple layer description and effective media approximation is developed for pyrometry in the case of thin film synthesis, in order to estimate the film property evolution along its thickness during the growth process in real time. The model is used to investigate optical properties of polycrystalline diamond film prepared by H{sub 2}/CH{sub 4}/N{sub 2} microwave plasma. It is shown that in the presence of nitrogen, the growth is strongly nonhomogeneous. The deposit, initially composed of large amounts of void and nondiamond phases, evolves rapidly towards highest quality dense film where the diamond phase is predominant.

• OSTI ID: 20960187
• Journal Information: Applied Physics Letters, Vol. 90, Issue 13; Other Information: DOI: 10.1063/1.2717558; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
APPROXIMATIONS
CRYSTAL GROWTH
DEPOSITION
DIAMONDS
HYDROGEN
LAYERS
METHANE
MICROWAVE RADIATION
NITROGEN
PLASMA
POLYCRYSTALS
REFRACTIVE INDEX
SIMULATION
THICKNESS
THIN FILMS