Atmospheric-pressure hybrid plasma with combination of ac and microwave
- Department of Molecular Science and Technology, Ajou University, San 5, Wonchon-Dong, Youngtong-Gu, Suwon 443-749 (Korea, Republic of)
A hybrid plasma system with combination of ac and microwave at atmospheric pressure was developed. The hybrid plasma is initiated by ac capillary plasma, is stabilized by a flowing channel of working gas through common electrodes, and is expanded by the dissipation of microwave energy, revealing two distinguishable plasma columns of about 1 m in length and a transition point. The capillary in the hybrid plasma system is working as a common electrode for the microwave and ac plasmas. Optical emission spectroscopy is used to characterize and monitor the argon and nitrogen excited species produced in different plasma columns.
- OSTI ID:
- 20880180
- Journal Information:
- Applied Physics Letters, Vol. 89, Issue 25; Other Information: DOI: 10.1063/1.2403930; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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