In situ mass measurement of electron-beam-induced nanometer-sized W-related deposits using a carbon nanotube cantilever

Journal Article · Mon Nov 06 00:00:00 EST 2006 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.2387886· OSTI ID:20880090

Sawaya, Shintaro; Akita, Seiji; Nakayama, Yoshikazu ^[1]

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1. Department Physics and Electronics, Osaka Prefecture University, 1-1 Gakuen-cho, Naka-ku, Sakai, Osaka 599-8531 (Japan)

Using a carbon nanotube oscillator, the authors performed in situ measurements of densities of electron-beam-induced tungsten compounds with size of less than 100 nm. Total mass of the deposit was proportional to the deposition time. A higher deposition rate was obtained at lower electron-beam acceleration voltage. Density of the deposit decreased from 2.7 to 1.4 g/cm{sup 3} with increasing acceleration voltage from 5 to 15 kV. These results indicate that the increased density with low-acceleration voltage produces effective decomposition of W(CO){sub 6}.

• OSTI ID: 20880090
• Journal Information: Applied Physics Letters, Vol. 89, Issue 19; Other Information: DOI: 10.1063/1.2387886; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ACCELERATION
CARBON
DECOMPOSITION
DEPOSITION
ELECTRIC POTENTIAL
ELECTRON BEAMS
NANOTUBES
TUNGSTEN COMPOUNDS