Hybrid-type temperature sensor for in situ measurement
- Sensor Photonics Research Center, Toyo University, 2100 Kujirai, Kawagoe, Saitama 350-8585 (Japan)
A hybrid-type surface temperature sensor combines the contact and noncontact methods, which allows us to overcome the shortcomings of both methods. The hybrid-type surface thermometer is composed mainly of two components: a metal film sheet that makes contact with an object and a radiometer that is used to detect the radiance of the rear surface of the metal film, which is actually a modified radiation thermometer. Temperature measurement using the hybrid-type thermometer with a several tens micrometer thick Hastelloy sheet, a highly heat and corrosion resistant alloy, is possible with a systematic error of -0.5 K and random errors of {+-}0.5 K, in the temperature range from 900 to 1000 K. This thermometer provides a useful means for calibration of in situ temperature measurement in various processes, especially in the silicon semiconductor industry. This article introduces the basic idea of the hybrid-type surface sensor, presents experimental results and discussions, and finally describes some applications.
- OSTI ID:
- 20861500
- Journal Information:
- Review of Scientific Instruments, Vol. 77, Issue 11; Other Information: DOI: 10.1063/1.2393160; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
- Country of Publication:
- United States
- Language:
- English
Similar Records
Enhancing ZnO nanowire gas sensors using Au/Fe2O3 hybrid nanoparticle decoration
Development of the Intelligent, Preventive Infrared (IR) Inspection System Housed in Hybrid Robotic Platforms