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Title: Single-walled carbon nanotube growth from ion implanted Fe catalyst

Abstract

The authors present experimental evidence that single-walled carbon nanotubes can be grown by chemical vapor deposition from ion implanted iron catalyst. They systematically characterize the effect of ion implantation dose and energy on the catalyst nanoparticles and nanotubes formed at 900 deg. C. They also fabricate a micromachined silicon grid for direct transmission electron microscopy characterization of the as-grown nanotubes. This work opens up the possibility of controlling the origin of single-walled nanotubes at the nanometer scale and of integrating them into nonplanar three-dimensional device structures with precise dose control.

Authors:
; ;  [1]
  1. Department of Electrical and Computer Engineering, University of Florida, Gainesville, Florida 32611 (United States)
Publication Date:
OSTI Identifier:
20860999
Resource Type:
Journal Article
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 89; Journal Issue: 15; Other Information: DOI: 10.1063/1.2360889; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0003-6951
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; CARBON; CATALYSTS; CHEMICAL VAPOR DEPOSITION; CRYSTAL GROWTH; ION IMPLANTATION; IRON; IRON IONS; NANOTUBES; PARTICLES; SILICON; TRANSMISSION ELECTRON MICROSCOPY

Citation Formats

Choi, Yongho, Sippel-Oakley, Jennifer, Ural, Ant, Department of Physics, University of Florida, Gainesville, Florida 32611, and Department of Electrical and Computer Engineering, University of Florida, Gainesville, Florida 32611. Single-walled carbon nanotube growth from ion implanted Fe catalyst. United States: N. p., 2006. Web. doi:10.1063/1.2360889.
Choi, Yongho, Sippel-Oakley, Jennifer, Ural, Ant, Department of Physics, University of Florida, Gainesville, Florida 32611, & Department of Electrical and Computer Engineering, University of Florida, Gainesville, Florida 32611. Single-walled carbon nanotube growth from ion implanted Fe catalyst. United States. https://doi.org/10.1063/1.2360889
Choi, Yongho, Sippel-Oakley, Jennifer, Ural, Ant, Department of Physics, University of Florida, Gainesville, Florida 32611, and Department of Electrical and Computer Engineering, University of Florida, Gainesville, Florida 32611. 2006. "Single-walled carbon nanotube growth from ion implanted Fe catalyst". United States. https://doi.org/10.1063/1.2360889.
@article{osti_20860999,
title = {Single-walled carbon nanotube growth from ion implanted Fe catalyst},
author = {Choi, Yongho and Sippel-Oakley, Jennifer and Ural, Ant and Department of Physics, University of Florida, Gainesville, Florida 32611 and Department of Electrical and Computer Engineering, University of Florida, Gainesville, Florida 32611},
abstractNote = {The authors present experimental evidence that single-walled carbon nanotubes can be grown by chemical vapor deposition from ion implanted iron catalyst. They systematically characterize the effect of ion implantation dose and energy on the catalyst nanoparticles and nanotubes formed at 900 deg. C. They also fabricate a micromachined silicon grid for direct transmission electron microscopy characterization of the as-grown nanotubes. This work opens up the possibility of controlling the origin of single-walled nanotubes at the nanometer scale and of integrating them into nonplanar three-dimensional device structures with precise dose control.},
doi = {10.1063/1.2360889},
url = {https://www.osti.gov/biblio/20860999}, journal = {Applied Physics Letters},
issn = {0003-6951},
number = 15,
volume = 89,
place = {United States},
year = {Mon Oct 09 00:00:00 EDT 2006},
month = {Mon Oct 09 00:00:00 EDT 2006}
}