Depth resolution improvement in secondary ion mass spectrometry analysis using metal cluster complex ion bombardment

Journal Article · Mon Jul 31 00:00:00 EDT 2006 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.2266995· OSTI ID:20860658

Tomita, M; Kinno, T; Koike, M; Tanaka, H; Takeno, S; Fujiwara, Y; Kondou, K; Teranishi, Y; Nonaka, H; Fujimoto, T; Kurokawa, A; Ichimura, S ^[1]

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1. Corporate Research and Development Center, Toshiba Corporation, 8 Shinsugita-cho, Isogo-ku, Yokohama 235-8522 (Japan)

Secondary ion mass spectrometry analyses were carried out using a metal cluster complex ion of Ir{sub 4}(CO){sub 7}{sup +} as a primary ion beam. Depth resolution was evaluated as a function of primary ion species, energy, and incident angle. The depth resolution obtained using cluster ion bombardment was considerably better than that obtained by oxygen ion bombardment under the same experimental condition due to reduction of atomic mixing in the depth. The authors obtained a depth resolution of {approx}1 nm under 5 keV, 45 deg. condition. Depth resolution was degraded by ion-bombardment-induced surface roughness at 5 keV with higher incident angles.

• OSTI ID: 20860658
• Journal Information: Applied Physics Letters, Vol. 89, Issue 5; Other Information: DOI: 10.1063/1.2266995; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
CARBON MONOXIDE
ION BEAMS
ION MICROPROBE ANALYSIS
ION PAIRS
IRIDIUM COMPOUNDS
KEV RANGE 01-10
MASS SPECTRA
MASS SPECTROSCOPY
OXYGEN IONS
RESOLUTION
ROUGHNESS