New long trace profiler based on phase plate diffraction for optical metrology of SSRF
- Shanghai Synchrotron Radiation Facility, Shanghai Institute of Applied Physics, CAS, P.O. Box 800-204, 201800 Shanghai (China)
A long trace profiler LTP-1200, with a novel f-{theta} system based on phase plate diffraction and a scanning range up to 1200 mm, has been developed at Shanghai Synchrotron Radiation Facility. The central dark line in the diffraction pattern generated by a {pi} phase plate is taken as the positioning benchmark. A magnet levitated linear rail with very high accuracy is used. A granite bench is employed to reduce deformation due to self-gravity of the rail. The focused diffraction pattern is recorded with an area charge-coupled device. The generalized regression neural network algorithm is adopted to improve the beam positioning precision. The static stability of LTP-1200 in 5 h is 0.14 {mu}rad, and the repeatability reaches 0.05 {mu}rad in a common laboratory without any special control of temperature, air turbulence, etc. Calibration tests were carried out with a high precision autocollimator and a standard spherical mirror, respectively. Results show the high performance and reliability of the LTP-1200.
- OSTI ID:
- 20853648
- Journal Information:
- Review of Scientific Instruments, Vol. 77, Issue 9; Other Information: DOI: 10.1063/1.2186253; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
- Country of Publication:
- United States
- Language:
- English
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