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Title: Studies of Discharge Parameters Influence on the IPD Plasma Deposition Process

Journal Article · · AIP Conference Proceedings
DOI:https://doi.org/10.1063/1.2168883· OSTI ID:20797957
 [1];  [2]
  1. Department of Plasma Physics and Technology, Institute for Nuclear Studies, 05-400 Otwock-Swierk (Poland)
  2. Faculty of Materials Science, Warsaw University of Technology, Woloska 141, 02-507 Warsaw (Poland)

The paper presents recent studies of a current sheet dynamics influence on the surface engineering process of impulse plasma deposition (IPD). During the IPD process plasma is generated in the working gas due to a high-voltage high-current oscillating pulse discharge, ignited within an interelectrode region of a coaxial accelerator. The changes of plasma dynamics and generation mechanisms, e.g. the electric arc instead of the plasma sheet formation during the consecutive half-periods of discharge, cause the different deposition efficiency for accelerator with the outer electrode system composed of stainless steel rods instead of standard tubular one. The coating efficiency and deposited layer quality have been examined for the titanium nitride as the model material for surface engineering.

OSTI ID:
20797957
Journal Information:
AIP Conference Proceedings, Vol. 812, Issue 1; Conference: PLASMA 2005: International conference on research and applications of plasmas; 3. German-Polish conference on plasma diagnostics for fusion and applications; 5. French-Polish seminar on thermal plasma in space and laboratory, Opole-Turawa (Poland), 6-9 Sep 2005; Other Information: DOI: 10.1063/1.2168883; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
Country of Publication:
United States
Language:
English