Absolute photoionization cross sections for Xe{sup 4+}, Xe{sup 5+}, and Xe{sup 6+} near 13.5 nm: Experiment and theory

Journal Article · Wed Mar 15 00:00:00 EST 2006 · Physical Review. A

DOI:https://doi.org/10.1103/PHYSREVA.73.0· OSTI ID:20786923

Aguilar, A; Gillaspy, J D; Gribakin, G F; Phaneuf, R A; Gharaibeh, M F; Kozlov, M G; Bozek, J D; Kilcoyne, A L. D. ^[1]

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1. National Institute of Standards and Technology, Gaithersburg, Maryland 20899-8421 (United States)

Absolute photoionization cross-section measurements for a mixture of ground and metastable states of Xe{sup 4+}, Xe{sup 5+}, and Xe{sup 6+} are reported in the photon energy range of 4d{yields}nf transitions, which occur within or adjacent to the 13.5 nm window for extreme ultraviolet lithography light source development. The reported values allow the quantification of opacity effects in xenon plasmas due to these 4d{yields}nf autoionizing states. The oscillator strengths for the 4d{yields}4f and 4d{yields}5f transitions in Xe{sup q+} (q=1-6) ions are calculated using nonrelativistic Hartree-Fock and random phase approximations. These are compared with published experimental values for Xe{sup +} to Xe{sup 3+} and with the values obtained from the present experimental cross-section measurements for Xe{sup 4+} to Xe{sup 6+}. The calculations assisted in the determination of the metastable content in the ion beams for Xe{sup 5+} and Xe{sup 6+}. The experiments were performed by merging a synchrotron photon beam generated by an undulator beamline of the Advanced Light Source with an ion beam produced by an electron cyclotron resonance ion source.

• OSTI ID: 20786923
• Journal Information: Physical Review. A, Vol. 73, Issue 3; Other Information: DOI: 10.1103/PhysRevA.73.032717; (c) 2006 The American Physical Society; Country of input: International Atomic Energy Agency (IAEA); ISSN 1050-2947
• Country of Publication: United States
• Language: English

Related Subjects

74 ATOMIC AND MOLECULAR PHYSICS
ADVANCED LIGHT SOURCE
AUTOIONIZATION
CATIONS
CROSS SECTIONS
ECR ION SOURCES
EXTREME ULTRAVIOLET RADIATION
GROUND STATES
HARTREE-FOCK METHOD
ION BEAMS
METASTABLE STATES
OPACITY
OSCILLATOR STRENGTHS
PHOTOIONIZATION
PHOTON BEAMS
PHOTON-ATOM COLLISIONS
PHOTONS
PLASMA
RANDOM PHASE APPROXIMATION
WIGGLER MAGNETS
XENON IONS