Particle-in-cell Monte Carlo and fluid simulations of argon-oxygen plasma: Comparisons with experiments and validations
- Department of Electronics and Electrical Engineering, Pohang University of Science and Technology, Pohang 790-784 (Korea, Republic of)
Particle-in-cell Monte Carlo collision (PIC-MCC) and fluid simulations of argon-oxygen plasmas in capacitively and inductively coupled plasma reactors are presented. Potential profiles and electron/ion kinetic information such as electron/ion energy distributions and temperatures are compared with experimental data as well as with other analytical and numerical results. One-dimensional PIC-MCC simulations compare favorably with experimental data obtained in capacitively coupled reactors over a wide range of pressure and power. Two-dimensional fluid simulations of capacitive discharges differs from the results of PIC-MCC simulations as nonlocal effects play an important role in these discharges. Fluid simulations as nonlocal inductively coupled plasmas, however, agree favorably with experimental observations.
- OSTI ID:
- 20783186
- Journal Information:
- Physics of Plasmas, Vol. 13, Issue 5; Other Information: DOI: 10.1063/1.2179430; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 1070-664X
- Country of Publication:
- United States
- Language:
- English
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